研究目的
Investigating the ammonia sensing characteristics of a tungsten trioxide (WO3) thin-film-based sensor device for high-performance ammonia sensing applications.
研究成果
The WO3 thin-film-based sensor device demonstrates excellent ammonia sensing properties, including a high sensing response, an extremely low detection level, and a relatively low optimal operating temperature. These advantages make the device promising for high-performance ammonia sensing applications.
研究不足
The study focuses on the ammonia sensing characteristics of a WO3 thin-film-based sensor, with limitations including the need for relatively high operating temperatures (up to 250 °C) and the potential for interference from other gases in practical applications.
1：Experimental Design and Method Selection:
The study involves the fabrication of a WO3 thin-film-based ammonia sensor using radio frequency sputtering. The sensor's performance is evaluated based on its response to various concentrations of ammonia gas at different temperatures.
2：Sample Selection and Data Sources:
A very thin WO3 film (~10 nm) is used as the sensing layer. The sensor's response is measured under introduced ammonia gas concentrations ranging from 10 ppb to 1000 ppm at temperatures from 175 °C to 275 °C.
3：List of Experimental Equipment and Materials:
The fabrication process involves a sapphire substrate, chromium (Cr)/platinum (Pt) interdigitated electrodes, and a WO3 thin film. The testing chamber includes a coiled tube heater and stainless-steel cell, with a proportional-integral-derivative temperature controller for precise temperature control.
4：Experimental Procedures and Operational Workflow:
The sensor's current-voltage characteristics and sensing response curves are measured with a Keithley 4200 semiconductor parameter analyzer. The sensor's response to ammonia gas is evaluated by introducing and removing ammonia gases at controlled concentrations and temperatures.
5：Data Analysis Methods:
The sensing response is defined as the ratio of the resistance change in air to that in the target gas ambience. The relationship between sensing response and ammonia concentration is analyzed using a logarithmic plot.
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