研究目的
To investigate the influences of nanostructure parameter and surface elasticity parameters on the nonlinear vibration of a nanoelectromechanical system under double-sided electrostatic actuation.
研究成果
The study demonstrates that the pull-in excitation frequency and the interval length of the bifurcation parameter corresponding to periodic and chaotic motions are significantly influenced by the length-scale parameter, surface elasticity modulus and density, and residual surface stress. The findings provide insights into the design and performance optimization of NEMS devices.
研究不足
The study focuses on numerical simulations and theoretical modeling, which may not fully capture all physical phenomena in real-world applications. The effects of environmental factors and manufacturing imperfections are not considered.
1：Experimental Design and Method Selection:
The study employs the consistent couple-stress theory and the Gurtin–Murdoch elasticity theory to model size dependency and surface energy effects. The nonlinear strain–displacement relationship is considered based on the Euler–Bernoulli beam assumption.
2：Sample Selection and Data Sources:
A silicon nanobeam with specific geometrical and material properties is used as the sample.
3：List of Experimental Equipment and Materials:
The study involves numerical simulations rather than physical experiments, so specific equipment and materials are not listed.
4：Experimental Procedures and Operational Workflow:
Hamilton’s principle is used to derive the governing differential motion’s equation. A reduced-order model is obtained through Galerkin’s procedure. Bifurcation diagrams are plotted to analyze the system's steady-state response.
5：Data Analysis Methods:
The Runge–Kutta method is used for numerical integration to solve the nonlinear differential equations of motion.
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