研究目的
To synthesize and characterize nanostructured C-Ti multilayer films by TVA method, focusing on their mechanical, optical, and electrical properties.
研究成果
The study successfully synthesized and characterized C-Ti multilayer films using the TVA method. Tribological measurements showed a decrease in friction coefficient with increased normal load. RAMAN spectra revealed mixtures of TiC, Ti3C2O2, and Ti3C2 phases. HRTEM images confirmed the presence of local crystalline organization of TiC and C. Electrical measurements indicated that electrical conductivity decreases with temperature, suggesting these structures are good thermal isolators.
研究不足
The study is limited by the specific conditions of the TVA method used for deposition and the characterization techniques applied. Potential areas for optimization include exploring other deposition methods and extending the range of characterization techniques.
1：Experimental Design and Method Selection:
The study used the Thermionic Vacuum Arc (TVA) method for depositing C-Ti multilayer films on silicon substrates. The layers consisted of a base layer of Carbon and seven alternating Carbon and Titanium layers.
2：Sample Selection and Data Sources:
Four batches of samples were prepared by varying the substrate temperature and ion acceleration potential.
3：List of Experimental Equipment and Materials:
The experimental setup included two independent anode-cathode systems inside the deposition chamber.
4：Experimental Procedures and Operational Workflow:
The deposition process involved setting the substrate temperature and bias voltage, followed by characterization using Electron Microscopy techniques and Raman Spectroscopy.
5：Data Analysis Methods:
The data from tribological, RAMAN, and electrical measurements were analyzed to understand the properties of the multilayer films.
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