研究目的
Investigating the effects of a cathode output aperture on the hollow cathode glow discharge and its lower operating pressure.
研究成果
The hollow cathode glow discharge can produce a plasma in a process vacuum chamber that is screened from sputtered cathode material by a cathode diaphragm. A double layer forms at the diaphragm ori?ce under specific conditions, influencing the discharge characteristics. At lower gas pressures, the double layer can be replaced by a high-voltage accelerating gap, enabling the production of plasma with the same density inside and outside the cathode.
研究不足
The study is limited to a specific range of gas pressures (0.01 to 10 Pa) and focuses on the effects of the cathode output aperture on the discharge characteristics. The findings may not be directly applicable to other types of discharges or different pressure ranges.
1：Experimental Design and Method Selection:
The study involves a glow discharge with a cylindrical hollow cathode mounted on a process vacuum chamber, serving as the discharge anode. A diaphragm is used to protect the discharge plasma from contamination. The discharge characteristics are studied in a wide range of gas pressures from 0.01 to 10 Pa.
2：01 to 10 Pa.
Sample Selection and Data Sources:
2. Sample Selection and Data Sources: The experiment uses a 0.5-m-diameter and 0.4-m-high vacuum chamber with a hollow cathode of varying lengths and diaphragm ori?ce diameters.
3：5-m-diameter and 4-m-high vacuum chamber with a hollow cathode of varying lengths and diaphragm ori?ce diameters.
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: The setup includes a vacuum chamber, turbo-molecular pump, rotary pump, hollow cathode, diaphragms with variable ori?ce diameters, discharge power supplies, and probes for measuring space potentials.
4：Experimental Procedures and Operational Workflow:
The discharge is ignited at a gas pressure of ～10 Pa, and the discharge voltage is measured at constant discharge current and decreasing pressure. The plasma glow and potential differences are observed and measured.
5：Data Analysis Methods:
The data is analyzed to understand the relationship between the diaphragm ori?ce area, gas pressure, and discharge characteristics, including the formation of a double layer and its effects on plasma density.
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