研究目的
To achieve a high output power density in an InAlGaN/GaN HEMT by employing a SiC/diamond-bonded heat spreader and to demonstrate its effectiveness in reducing thermal resistance and enhancing power performance.
研究成果
The InAlGaN/GaN HEMT with a SiC/diamond-bonded heat spreader achieved a record high output power density of 22.3 W/mm, demonstrating the effectiveness of the InAlGaN barrier layer and the heat-spreading structure for high-power applications. The thermal resistance was significantly reduced, indicating the potential for long-pulse or continuous-wave applications.
研究不足
The maximum drain bias was restricted to 100 V due to the limitations of the evaluation equipment, suggesting that higher output power could potentially be achieved at higher drain biases. Additionally, the study did not employ advanced electric field control technologies, which could further improve the output power density.
1：Experimental Design and Method Selection:
The study involved the fabrication of an InAlGaN/GaN HEMT with a SiC/diamond-bonded heat spreader. The design rationale focused on achieving high output power density and reducing thermal resistance.
2：Sample Selection and Data Sources:
Epitaxial layers were grown on a semi-insulating SiC substrate by metal-organic vapor phase epitaxy (MOVPE).
3：List of Experimental Equipment and Materials:
The fabrication process included the use of Ti/Al for ohmic electrodes, Ni/Au for Schottky gate electrodes, and a diamond substrate bonded to the SiC substrate by the surface activated bonding (SAB) method.
4：Experimental Procedures and Operational Workflow:
The device fabrication involved thinning the SiC substrate, smoothing the back-side surface by chemical mechanical polishing (CMP), and bonding the diamond substrate. The thermal resistance and output power density were then measured.
5：Data Analysis Methods:
The thermal resistance was evaluated by measuring the surface temperature as a function of the applied DC power, and the output power density was assessed through load-pull measurements.
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