研究目的
Investigating the impact of black silicon (b‐Si) nanostructure on light‐ and elevated temperature‐induced degradation (LeTID) in industrial p‐type multicrystalline silicon (mc‐Si) passivated emitter and rear cells (PERC).
研究成果
The application of b‐Si nanostructure reduces the amount of LeTID in industrial p‐type mc‐Si PERC cells. B‐Si cells with ALD AlOx surface passivation showed no degradation, while those with SiNx passivation showed minimal degradation compared to acidic‐textured cells. The results suggest that b‐Si's benefits extend beyond optical properties, potentially due to enhanced gettering of impurities or reduced hydrogen in‐diffusion.
研究不足
The study was limited to industrial p‐type mc‐Si PERC cells and specific degradation conditions (0.5 sun illumination at 75°C for 1 week). The exact mechanism for LeTID mitigation by b‐Si remained unresolved.
1:Experimental Design and Method Selection:
The study involved fabricating industrial b‐Si solar cells following the standard PERC process from material known to be prone to LeTID. The cells were divided into groups based on surface texture (acidic texture or b‐Si) and front surface passivation (SiNx or AlOx).
2:Sample Selection and Data Sources:
More than 100 industrial‐size mc‐Si wafers were used, taken from a single column of an ingot close to each other near the ingot center.
3:List of Experimental Equipment and Materials:
Equipment included deep reactive ion etching (DRIE) for b‐Si nanostructure, atomic layer deposition (ALD) for AlOx, and plasma‐enhanced chemical vapor deposition (PECVD) for SiNx. Materials included potassium hydroxide (KOH), hydrochloric acid (HCl), and hydrofluoric acid‐ozone (HF/O3) for cleaning.
4:Experimental Procedures and Operational Workflow:
The process included saw damage removal, b‐Si etching, phosphorus emitter formation, passivation, screen printing, and firing. Cells were characterized by current‐voltage (I‐V) measurements, internal quantum efficiency (IQE) spectra, and photoluminescence (PL) maps before and after degradation under 0.5 sun illumination at 75°C for 1 week.
5:5 sun illumination at 75°C for 1 week.
Data Analysis Methods:
5. Data Analysis Methods: Analysis included comparing IQE spectra and PL maps to assess degradation, and evaluating solar cell parameters from I‐V measurements.
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