研究目的
To design an error correcting algorithm for the Fast Tool Servo (FTS) system to compensate for amplitude attenuation and phase delay in tool tracking, thereby improving the machining quality of lens arrays.
研究成果
The designed error correcting algorithm effectively compensates for amplitude attenuation and phase delay in the FTS system, improving the machining quality of lens arrays. The depth error of the machined lens is significantly reduced to 0.06 μm in peak-to-valley value, demonstrating the algorithm's accuracy and reliability.
研究不足
The study is limited to the machining of lens arrays with specific dimensions and materials. The effectiveness of the error correcting algorithm is verified under certain conditions, and its applicability to other types of optical components or under different machining conditions is not explored.
1：Experimental Design and Method Selection:
The study involves designing an error correcting algorithm for the FTS system to compensate for amplitude attenuation and phase delay. The algorithm is based on anticipatory iterative learning theory, with lead step number and lead gain planned for error correction.
2：Sample Selection and Data Sources:
A lens array is machined on an aluminum alloy specimen to verify the algorithm's effectiveness.
3：List of Experimental Equipment and Materials:
The FTS system includes a piezoelectric transducer (PZT), tool fixture, diamond tool, tool holder with flexible hinges, preload unit, and control system. A Zygo NewView 700s interferometer is used for measurement.
4：Experimental Procedures and Operational Workflow:
The input signals for the FTS system are set based on the error correcting algorithm, and the machining process combines with NC movement of an ultra-precision turning machine. The feed rate of the X axis and the rotational speed of the C axis are specified.
5：Data Analysis Methods:
The effectiveness of the error correcting algorithm is evaluated by measuring the depth error of the machined lens array using an interferometer.
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