研究目的
Investigating the design and simulation of a 10 GHz VCO using an RF MEMS solenoid inductor to achieve high performance in terms of tuning range, phase noise, and output power.
研究成果
The study demonstrated the potential of using an RF MEMS solenoid inductor with a copper coil and SU8 dielectric substrate in a 10 GHz VCO to achieve high performance in terms of tuning range, phase noise, and output power. The results suggest that such a VCO could be efficient for low phase-noise wireless systems.
研究不足
The study is limited to simulation results and does not include experimental validation. The performance of the VCO may vary in practical applications due to fabrication tolerances and environmental conditions.
1：Experimental Design and Method Selection:
The study involved designing and simulating four solenoid inductors using FEM software to evaluate the effect of dielectric substrate and metal on the inductors' responses. A cross-coupled CMOS VCO was then designed and simulated using the best performing RF MEMS solenoid inductor.
2：Sample Selection and Data Sources:
Four solenoid inductors with the same geometrical dimensions but different materials for the substrate and core metal were studied.
3：List of Experimental Equipment and Materials:
FEM software, ADS software, TSMC RF CMOS 0.13 μm technology, SU8 dielectric substrate, silicon substrate, gold and copper metals.
4：13 μm technology, SU8 dielectric substrate, silicon substrate, gold and copper metals.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The study involved simulating the inductors' responses to frequency variations, designing the VCO, and analyzing its time domain and frequency responses.
5：Data Analysis Methods:
The performance of the inductors and VCO was analyzed in terms of inductance value, quality factor, tuning range, phase noise, and output power.
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