研究目的
To present a comprehensive analysis of high frequency CMUT arrays based on an experimentally verified CMUT array simulation tool and to obtain key design insights and tradeoffs for receive only and pulse-echo imaging.
研究成果
The receiver performance of CMUT arrays can be close to an ideal piston, independent of gap thickness and applied DC bias, when coupled to low noise electronics with arrays utilizing smaller membranes performing better. For pulse-echo imaging, thermal mechanical current noise limited SNR is observed to be dependent on the maximum available voltage and gap thickness.
研究不足
The model does not consider mechanical coupling between CMUT membranes through the substrate, such as Lamb waves in the silicon wafer. The design guidelines are valid for high frequency CMUT arrays with practical membrane dimensions.