摘要： This paper presents the results concerning the investigation of the morphological and structural properties of Gd0.1Ce0.9O1.95 layers deposited on crystalline (111) YSZ subtrates by RF magnetron sputtering. Room temperature as-grown samples have been annealed at different temperatures from 600°C to 1300°C. Atomic Force Microscopy analysis shows an increase in the average grain size dimensions with increasing annealing temperatures. X-Ray Diffraction measurements indicates a preferential growth of the grains along the (111) direction with a decrease in the evaluated c-axis as a function of the annealing temperature, probably related to an over-oxidation of the samples. X-Ray Reflectivity studies, performed on thin layers annealed at temperatures from 700-1000°C, points out the presence of zones with different densities and roughness at the layer/substrate interface and at the layer/vacuum surface. The behaviour of these zones as a function of temperature has been investigated. The obtained results seem to exclude the presence of consistent inter-diffusion phenomena at the GDC/YSZ interface.