1：Experimental Design and Method Selection:

The study involved irradiating polycarbonate samples with multicharged ions (O3+, O5+, Ar8+) at low kinetic energies (0.375-1.0 keV) to investigate surface modifications. XPS and SEM were used for post-irradiation analysis to detect chemical changes and beam profiles.

2：375-0 keV) to investigate surface modifications. XPS and SEM were used for post-irradiation analysis to detect chemical changes and beam profiles. Sample Selection and Data Sources:

2. Sample Selection and Data Sources: Samples were diced from a commercial polycarbonate sheet (Lexan), cleaned with DI water, isopropyl alcohol, and ethanol. Ion irradiations were performed using the EBIS-SC ion source at Clemson University.

3：List of Experimental Equipment and Materials:

Equipment included the EBIS-SC ion source, Faraday cup for beam current measurement, Hitachi S4800 SEM, Kratos Axis Ultra XPS system, and polycarbonate samples. Materials included argon and oxygen ions.

4：Experimental Procedures and Operational Workflow:

Ions were decelerated and focused onto samples at normal incidence. Beam profiles were measured with a Faraday cup. Post-irradiation, SEM and XPS analyses were conducted, with XPS spectra recorded across the irradiated region and fitted using Gaussian/Lorentzian models.

5：Data Analysis Methods:

XPS data were analyzed by fitting peaks to identify bond types (e.g., C-C, C-O, C=O) and comparing changes between pristine and irradiated samples. SRIM simulations were used to estimate ion penetration depths.