研究目的
To investigate the effect of plasma treatment on adhesion strength and moisture absorption characteristics between epoxy molding compound and silicon chip (EMC/chip) interface at high temperature.
研究成果
Plasma treatment significantly enhances adhesion strength and reduces moisture absorption at the EMC/chip interface, with optimal results at one treatment. Excessive treatments decrease adhesion due to reduced surface roughness. The newly devised test jig is effective for high-temperature measurements, and plasma treatment improves reliability in semiconductor packaging.
研究不足
Specific plasma treatment conditions (pressure and power) are not disclosed due to non-disclosure agreements. The study is limited to the materials and conditions tested, and further research is needed to understand the decrease in adhesion strength with excessive plasma treatments.
1:Experimental Design and Method Selection:
The study involved designing a new adhesion shear test jig to measure adhesion strength at high temperature (200°C), varying plasma treatment numbers and moisture absorption times, and using AFM and SEM for surface and fracture analysis.
2:Sample Selection and Data Sources:
Specimens were semiconductor packages from Samsung Electronics, consisting of EMC, Si chip, DAF, and PCB, with plasma treatments applied to Si chip surfaces.
3:List of Experimental Equipment and Materials:
Equipment includes the devised adhesion test jig, micro tensile-testing machine (LLOYD Instrument), thermal chamber (SH-ND054, SAMHEUNG ENERGY), water bath (LWB-122A, DANHAN LABTECH Co.), AFM (XE100, PSIA), SEM (S4800, Hitachi), and ABAQUS software for FEM analysis. Materials include Ar gas for plasma treatment and various semiconductor package components.
4:Experimental Procedures and Operational Workflow:
Specimens were prepared with varying plasma treatments, mounted in the test jig, heated to 200°C, and subjected to shear tests. Moisture absorption tests involved immersion in water at 85°C for specified times, followed by adhesion strength measurements. AFM and SEM were used for surface roughness and fracture morphology analysis.
5:Data Analysis Methods:
Adhesion strength was calculated from load-displacement curves, with averages and standard deviations computed. Moisture uptake was calculated using weight measurements. FEM analysis was conducted to study stress distribution.
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