研究目的
Investigating the behavior and stability of Al/Cu/Ti three-layered electrodes in surface acoustic wave filters under high power conditions to improve power durability.
研究成果
The Al/Cu/Ti three-layered electrodes, particularly the Al (102 nm)/Cu (10 nm)/Ti (5 nm) configuration, demonstrated higher stability under high power conditions compared to traditional Al-Cu alloy electrodes, with a maximum power level of 32.8 dBm. This improvement is attributed to the precipitation of θ-CuAl2 at the bottom edge and Cu-doped α-Al in the center, which enhances resistance to acoustomigration. The findings suggest that such layered electrodes are promising for high-power SAW filter applications, though optimization of layer thicknesses is needed to minimize resistance increases.
研究不足
The study is limited to specific electrode configurations and a single frequency (2.7 GHz). The FEM simulation assumes ideal material properties and may not fully capture real-world thermal effects. The use of high-purity materials and controlled deposition conditions may not be scalable for commercial applications. Temperature rise during high power loading was not precisely quantified due to computational constraints.
1：Experimental Design and Method Selection:
The study involved fabricating SAW filters with different electrode configurations (Al-Cu alloy and Al/Cu/Ti layered electrodes) and subjecting them to high power loading tests. Finite element method (FEM) simulation was used to analyze stress distribution.
2：Sample Selection and Data Sources:
Samples were fabricated on 42°-rotated Y-Cut LiTaO3 substrates using standard photolithography and lift-off processes. Five electrode types were prepared with varying thicknesses of Al, Cu, and Ti layers.
3：List of Experimental Equipment and Materials:
Equipment included a vector network analyzer for frequency response measurements, X-ray diffraction (XRD) for crystal structure analysis, scanning electron microscopy (SEM) for morphology examination, high-resolution transmission electron microscopy (HRTEM) with energy dispersive spectrometer (EDS) for microstructural and elemental analysis, and focused ion beam for sample preparation. Materials included high-purity Ti, Cu, and Al targets.
4：Experimental Procedures and Operational Workflow:
Electrodes were deposited via sputtering at specified rates and pressures. Resistance was measured using the four-terminal method. High power loading was performed by gradually increasing input power from 27 dBm at 95°C ambient temperature until device failure (insertion loss increase >
5：3 dB). Morphological and microstructural analyses were conducted before and after loading. Data Analysis Methods:
Data were analyzed using FEM simulation in COMSOL Multiphysics 5.3 for stress and displacement, and EDS for elemental composition. Statistical analysis of FWHM from XRD rocking curves was performed.
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