研究目的
To develop high-refractive-index material-embedded trench-like (ETL) active antennas for improving photoresponsivities and achieving omnidirectional and broadband photodetection at telecommunication wavelengths in silicon-based devices.
研究成果
The ETL antenna strategy significantly enhances photoresponsivities and enables omnidirectional and broadband photodetection, making it promising for applications in optoelectronics, energy harvesting, and sensing.
研究不足
The study may have limitations in scalability for large-area applications and potential variations in device performance due to fabrication imperfections. Optimization of structural parameters is necessary for broader applicability.
1:Experimental Design and Method Selection:
The study involved designing ETL antennas using high-refractive-index materials (e.g., silicon) to shorten the effective wavelength and enhance absorption. 3D finite-difference time-domain (FDTD) simulations were used to model optical behaviors and optimize structural parameters. Fabrication involved conventional semiconductor manufacturing processes, including lithography and etching.
2:Sample Selection and Data Sources:
Silicon substrates were used with structured trench-like antennas. Optical constants for materials were obtained from literature.
3:List of Experimental Equipment and Materials:
Equipment included FESEM for imaging, and materials included silicon, gold films, and antireflection coatings.
4:Experimental Procedures and Operational Workflow:
Fabrication steps included patterning TL structures on Si, depositing Au films, and applying ARC layers. Photocurrent measurements were conducted under IR illumination at zero bias to determine responsivities.
5:Data Analysis Methods:
Data were analyzed using FDTD simulations for absorbance and electric field distributions. Photoresponsivities were calculated from measured photocurrents, and linearity was assessed using R-squared values.
独家科研数据包,助您复现前沿成果,加速创新突破
获取完整内容