研究目的
To design a multi-electrode force-sensitive resonator cluster using energy trapping theory to reduce temperature and other interference factors and improve force-sensitivity for sensor applications.
研究成果
The quartz resonator cluster designed using energy trapping theory achieves high frequency stability (10^-10 orders of magnitude), improved temperature characteristics, and a significant increase in force sensitivity coefficient to 9992 Hz/N, making it suitable for high-precision digital inertial sensors.
研究不足
The design relies on specific assumptions in energy trapping theory, and the experiments are conducted under controlled conditions; real-world environmental factors may affect performance. The use of a single quartz wafer limits scalability and may introduce manufacturing complexities.
1：Experimental Design and Method Selection:
The study employs energy trapping theory to derive and calculate resonance energy distribution, finite element method for analysis, and common mode rejection principle for signal processing.
2：Sample Selection and Data Sources:
A circular AT-cut quartz wafer with specific dimensions is used, with electrodes placed based on stress distribution calculations.
3：List of Experimental Equipment and Materials:
Quartz crystal wafer, gold electrodes, temperature test chamber, frequency stabilization tester, static experiment device including metal diaphragm, cylindrical shell, anvils, and glue.
4：Experimental Procedures and Operational Workflow:
The resonator cluster is designed with multiple electrodes, tested for frequency stability at room temperature, temperature characteristics from -50 to 70°C, and force-frequency characteristics using a static force application setup.
5：Data Analysis Methods:
Frequency stability is calculated using standard deviation, temperature and force responses are measured and analyzed, and beat frequency signals are processed using subtraction and superposition methods with linear fitting by least squares.
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