1：Experimental Design and Method Selection:

The study used electron beam evaporation to deposit CePO4 thin films on silicon substrates, followed by annealing at various temperatures in nitrogen atmosphere to study their photoluminescence properties. Theoretical models for crystal structure and luminescence mechanisms were referenced.

2：Sample Selection and Data Sources:

High-purity CePO4 powders (99.99%) were used as initial materials, compressed into tablets, and deposited onto Si substrates. Samples were annealed at temperatures from 700 to 1100 °C for 30 min in N

3：99%) were used as initial materials, compressed into tablets, and deposited onto Si substrates. Samples were annealed at temperatures from 700 to 1100 °C for 30 min in NList of Experimental Equipment and Materials:

2. 3. List of Experimental Equipment and Materials: Electron beam evaporation system (EVA450), tablet press machine (769YP-24B), quartz crystal thickness monitor, fluorescence spectrometer (FLS920) with 450 W xenon lamp, X-ray diffractometer (Bruker D8 ADVANCE), scanning electron microscope (Hitachi S-4800), energy-dispersive X-ray spectroscopy (EDS) attached to SEM.

4：Experimental Procedures and Operational Workflow:

Films were deposited at room temperature in high vacuum (2.2 × 10^-3 Pa) with electron gun voltage of 6 kV and current of 0.85 A, evaporation rate controlled at 0.8–1.2 ?/s to achieve 160 nm thickness. Annealing was done in N2 for 30 min. PL and PLE spectra were measured using the spectrometer, XRD for crystal structure, SEM for morphology, and EDS for elemental analysis, all at room temperature.

5：2 × 10^-3 Pa) with electron gun voltage of 6 kV and current of 85 A, evaporation rate controlled at 8–2 ?/s to achieve 160 nm thickness. Annealing was done in N2 for 30 min. PL and PLE spectra were measured using the spectrometer, XRD for crystal structure, SEM for morphology, and EDS for elemental analysis, all at room temperature. Data Analysis Methods:

5. Data Analysis Methods: XRD patterns were compared to JCPDF standards, PL intensity trends were analyzed with annealing temperature, SEM images were used to assess crystallinity, and EDS data were tabulated for elemental concentrations.