研究目的
To address the degradation and high contact resistance issues in ultrathin black phosphorus field effect transistors by using PMMA capping to enhance durability and tune Schottky barriers.
研究成果
PMMA capping effectively enhances the durability of ultrathin BP FETs in ambient conditions and tunes the Schottky barriers, reducing the electron injection barrier by ~13 meV and improving on/off ratios. E-beam irradiation further shifts the charge neutral point, enabling electron dominance at zero gate voltage. Partially capped BP channels allow for functional p-n diodes with high rectification factors, demonstrating the potential for future device applications in microelectronics and photonics.
研究不足
The study is conducted on specific ultrathin BP flakes and may not generalize to all thicknesses or materials. The PMMA capping and e-beam irradiation processes might introduce variability, and long-term stability beyond 50 hours is not extensively tested. The experiments are performed in vacuum, which may not fully represent ambient conditions.
1:Experimental Design and Method Selection:
The study involves fabricating ultrathin black phosphorus field effect transistors (FETs) and applying PMMA capping to investigate its effects on durability and Schottky barrier tuning. Electrical transport properties are analyzed using current-voltage (I-V) characteristics and thermionic emission theory.
2:Sample Selection and Data Sources:
Ultrathin BP flakes (thickness less than 10 nm) are mechanically exfoliated from commercially available bulk material and transferred onto SiO2/p-type Si substrates.
3:List of Experimental Equipment and Materials:
Equipment includes atomic force microscope (AFM), Raman spectroscopy (WITech alpha-300), electron beam lithography system, electron beam evaporator, Keithley 4200 for electrical measurements, and a vacuum chamber. Materials include BP flakes, PMMA powder (average Mw ca.
4:96×105), anisole solution, Cr/Au for electrodes, and acetone. Experimental Procedures and Operational Workflow:
BP flakes are exfoliated and characterized. PMMA is spin-coated and baked. FETs are fabricated with Cr/Au contacts using electron beam lithography and evaporation. Electrical measurements are conducted in vacuum. For irradiation, PMMA is exposed to e-beam and solidified, with unexposed parts removed by acetone.
5:Data Analysis Methods:
Data is analyzed using Arrhenius plots to extract effective Schottky barriers, and I-V curves are used to study transport properties and on/off ratios.
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Raman Spectroscopy
alpha-300
WITech
Used to identify and characterize BP flakes by acquiring Raman spectra.
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Keithley 4200
4200
Keithley
Used for electrical measurements of FETs in a vacuum chamber.
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Atomic Force Microscope
Used to image the BP sample and reveal surface cleanliness and thickness.
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Electron Beam Lithography System
Used to pattern contact electrodes and expose PMMA layer with e-beam irradiation.
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Electron Beam Evaporator
Used to deposit Cr/Au layers as source and drain electrodes.
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Glove Box
MBRAUN
Used to carry out experiments in an argon-filled environment to protect BP from degradation.
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Hot Plate
Used for soft baking PMMA film at 110°C.
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Spin Coater
Used to spin-coat PMMA solution onto substrates.
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Vacuum Chamber
Used for electrical measurements at 10-6 Torr and sample transfer.
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Desi-vac Container
Used to transfer samples between steps to minimize exposure to ambient conditions.
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