研究目的
To describe the design and performance of two new high-resolution interline CCD image sensors (43-Mp and 50-Mp) for industrial, machine vision, and aerial photography applications, addressing challenges in manufacturing large sensors with superior image quality.
研究成果
The 43- and 50-Mp IT-CCD sensors demonstrate superior image quality with eliminated stitching seams, low read noise, dark current, and smear, making them suitable for high-performance applications in industrial, machine vision, and aerial photography. The design innovations, such as the three-polysilicon process and improved output amplifiers, enhance performance over previous models.
研究不足
The paper does not explicitly state limitations, but potential constraints include the scalability of the three-polysilicon process, challenges in further pixel size reduction, and the specific application focus on industrial and aerial uses, which may not cover all imaging scenarios.
1：Experimental Design and Method Selection:
The paper focuses on the design and performance evaluation of CCD image sensors, utilizing a three-polysilicon process to eliminate stitching seams, and includes simulations (e.g., TCAD modeling) and empirical testing.
2：Sample Selection and Data Sources:
The sensors themselves are the samples, fabricated at ON Semiconductor's facility, with performance data collected from characterization tests.
3：List of Experimental Equipment and Materials:
Includes lithography tools (e.g., steppers), fabrication equipment for CCD sensors, and testing setups for measuring parameters like quantum efficiency, noise, and dark current.
4：Experimental Procedures and Operational Workflow:
Involves sensor fabrication using specific processes (e.g., three polysilicon layers), followed by performance testing such as photon-transfer curve measurements, linearity tests, and image capture for uniformity and smear assessment.
5：Data Analysis Methods:
Uses standard metrics for image sensor evaluation, including statistical analysis of uniformity, noise measurements, and comparison with previous sensor models (e.g., KAI-29050).
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