研究目的
To calibrate the lateral performance of a focus variation microscope by determining amplification, linearity, and perpendicularity characteristics using a novel material measure and procedures.
研究成果
The proposed material measure and procedures effectively calibrate the lateral scale of FVM, showing that image stitching significantly reduces stage errors in x and y directions but not diagonally. Future work should focus on designing artefacts for single-image field measurements and investigating other characteristics.
研究不足
The material measure may not be suitable for all surface types; FVM has difficulty with highly reflective or smooth surfaces. Stitching reduces errors in x and y directions but not diagonally, and increases non-linearity. The study is limited to lateral scale calibration; other metrological characteristics like topographic spatial resolution are not addressed.
1：Experimental Design and Method Selection:
The study involved designing and manufacturing a cross-grating artefact with hemispherical grooves for use with focus variation microscopy (FVM). Procedures were developed to measure amplification, linearity, and perpendicularity characteristics. Measurements were conducted with and without image stitching using 5× and 10× objective lenses.
2：Sample Selection and Data Sources:
A custom-made stainless steel artefact with a 6×6 grid of calottes (hemispherical grooves) was used. Calibration data were obtained using a Zeiss O-Inspect CMM as a reference.
3：List of Experimental Equipment and Materials:
Focus variation microscope with 5× and 10× objectives, Zeiss O-Inspect CMM, Kern Evo micro-milling machine, Kemet LM15 lapping machine, stainless steel grade 303, carbide end mills.
4：Experimental Procedures and Operational Workflow:
The artefact was manufactured via milling and lapping. Calottes' centers were measured with the CMM for calibration. FVM measurements were performed in horizontal, vertical, and diagonal directions, with and without stitching, and replicated three times. Data were analyzed to compute errors and characteristics.
5：Data Analysis Methods:
Errors were calculated as differences between FVM-measured and CMM-calibrated distances. Amplification coefficient, linearity deviation, and perpendicularity deviation were derived according to ISO/DIS 25178 standards. Uncertainty analysis was performed using methods from ISO/TS 15530-2.
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