研究目的
To study the manufacturing and testing of a diaphragm Fabry-Perot pressure sensor, including the development of a new fitting demodulation method for obtaining optical parameters and evaluating its sensitivity and linearity for applications in fluid mechanics measurement.
研究成果
The study successfully developed a diaphragm F-P pressure sensor with a simple and repeatable manufacturing method. The new fitting demodulation method allows for simultaneous determination of multiple optical parameters, which is not achievable with general measurement methods. The sensor exhibits high sensitivity (0.0797 rad/MPa) and linearity (0.9975), with an outer diameter of 125 μm enabling high spatial resolution. It shows great potential for applications in fluid mechanics measurement, such as blood pressure and underwater shock measurement.
研究不足
The paper does not explicitly mention specific limitations, but potential areas for optimization could include the sensitivity to environmental factors, the complexity of the manufacturing process, and the need for precise control during fabrication to ensure repeatability and accuracy.
1：Experimental Design and Method Selection:
The study involves designing and fabricating a diaphragm F-P pressure sensor using single-mode and hollow-core fibers, with a focus on creating a robust F-P cavity and quartz diaphragm. A curve-fitting method based on derived optical interference equations is used to demodulate sensor parameters.
2：Sample Selection and Data Sources:
The sensor is fabricated using commercial single-mode optical fiber (outer diameter 125 μm, core diameter 10 μm) and hollow-core optical fiber (outer diameter 125 μm, inner diameter 75 μm). Data is collected from the sensor's output spectrum under pressure calibration.
3：List of Experimental Equipment and Materials:
Equipment includes fiber optic wire stripper, fiber cutting tools (FITEL S325A), fiber splicers (FITEL S177), optical microscope (magnification 800), broadband light source (spectral 1400nm-1700nm), spectrometer (AQ6370B), three-dimensional micro displacement table (Zhuo Li Han light, μlevel displacement regulation), bare fiber grinding tester (Ultra Tec NanoPol, grind propulsion function), and fitting software (1stOpt). Materials are the optical fibers mentioned.
4：Experimental Procedures and Operational Workflow:
The manufacturing process involves cutting and fusing fibers using splicers with specific parameters (discharge strength 40mA, discharge time 300ms), controlling hollow fiber length to 30-50 μm using a micro displacement table and microscope, cutting a quartz diaphragm to about 20 μm thickness, lapping with abrasive paper (9 μm granularity) to reduce reflectivity, and recording output spectra with the spectrometer and light source. Pressure calibration is performed using a piston pressure calibrator (maximum pressure 60Mpa), with weights added and removed to record spectral information, repeated three times for repeatability.
5：Data Analysis Methods:
Data analysis involves curve fitting the output spectrum using the derived formula to obtain parameters like reflectivities, cavity length, and diaphragm thickness. Fast Fourier Transform (FFT) analysis is used for phase extraction during pressure calibration, and linear fitting is applied to the pressure-phase relationship.
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fiber splicer
S177
FITEL
Used for fusing optical fibers together during sensor fabrication.
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fiber cutting tool
S325A
FITEL
Used for cutting optical fibers to form flat end faces.
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optical microscope
Used for observing and controlling the cutting and grinding processes with magnification.
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broadband light source
Provides light input for the sensor, with a spectral range of 1400nm-1700nm.
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spectrometer
AQ6370B
Used for acquiring the output spectrum of the sensor.
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three-dimensional micro displacement table
Zhuo Li Han light
Used for controlling the distance during fiber cutting and grinding to achieve precise lengths.
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bare fiber grinding tester
NanoPol
Ultra Tec
Used for lapping the quartz diaphragm to reduce surface reflectivity.
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fitting software
1stOpt
Used for curve fitting the output spectrum to obtain sensor parameters.
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piston pressure calibrator
Used for static pressure calibration of the sensor, with a maximum pressure of 60Mpa.
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