研究目的
To develop a two-stage plasma-thermal nitridation process for producing aluminum nitride powders from aluminum powders, aiming to reduce reaction temperature and time while preventing agglomeration and improving efficiency for mass production.
研究成果
The two-stage plasma-thermal nitridation process successfully produces high-purity AlN powders with reduced particle size (<1 μm) and no agglomeration, achieving up to 96% conversion at lower temperatures (950°C) and shorter times (1 h) compared to traditional methods. This approach is efficient and suitable for mass production, addressing key issues like agglomeration and high energy consumption.
研究不足
The process may still require optimization for scalability and cost-effectiveness in industrial settings. The use of plasma technology, while effective, adds complexity and initial equipment costs. The study focused on specific conditions (e.g., temperature, time, NH4Cl ratio), and variations might affect outcomes.
1:Experimental Design and Method Selection:
A two-stage synthesis process was used, combining microwave plasma nitridation as a pre-synthesis step at low temperature (550°C) to form an AlN shell, followed by thermal nitridation at higher temperatures (850-1050°C) for complete conversion. This design leverages the advantages of both plasma and thermal techniques to avoid agglomeration and enhance nitridation efficiency.
2:Sample Selection and Data Sources:
Aluminum powder (purity 99.8%, particle size 2-5 μm) and NH4Cl powder (purity 99.99%, particle size 1-4 μm) were used. Samples were prepared as ingots by compressing at 2000 psi.
3:8%, particle size 2-5 μm) and NH4Cl powder (purity 99%, particle size 1-4 μm) were used. Samples were prepared as ingots by compressing at 2000 psi. List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: Equipment includes a microwave plasma-nitridation system (magnetron YJ-1600, waveguide WR340), high-temperature furnace, X-ray diffractometer (XRD RINT-2000), thermogravimetric analyzer (TGA SDT Q600), scanning electron microscope (SEM S3000N), and optical emission spectrometer (OES HR 4000CG). Materials include N2 gas, Al powder, and NH4Cl powder.
4:Experimental Procedures and Operational Workflow:
First stage: Plasma nitridation at 550°C for 2-10 min with 1200 W power, N2 flow rates of 3 slm (axial) and 9 slm (swirl). Second stage: Thermal nitridation in a furnace with heating rate of 15°C/min to 850-1050°C, held for 1 h with N2 flow rate of 1 slm. Samples were analyzed using XRD, TGA, SEM, and OES.
5:Data Analysis Methods:
XRD for crystal structure analysis, TGA for AlN content calculation using a specific equation, SEM for particle size and morphology, and OES for active species measurement.
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X-ray diffractometer
RINT-2000
Rigaku
Analyzing crystal structure of synthesized powders.
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scanning electron microscope
S3000N
Hitachi
Examining particle sizes and morphologies of powders.
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optical emission spectrometer
HR 4000CG
Ocean Optics, Inc.
Measuring active species in the discharge zone.
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magnetron
YJ-1600
National Electronics
Generating microwaves for plasma ignition in the nitridation process.
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waveguide
WR340
ASTEX
Transmitting microwaves to the cavity for plasma generation.
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thermogravimetric analyzer
SDT Q600
TA Instruments
Measuring thermal characteristics and weight changes of samples.
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Al powder
ThinTech Materials Tech. Co., Ltd.
Raw material for synthesizing AlN powders.
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NH4Cl powder
Sigma-Aldrich
Additive to prevent agglomeration and promote nitridation.
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