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Optimization of ultrafast laser parameters for 3D micromachining of fused silica
摘要： We present an optimization study on laser parameters for 3D micromachining of fused silica to achieve critical goals for practical applications including high surface quality, high volume production, and complex surfaces by ultrafast laser direct writing assisted chemical etching. We conducted experiments on laser pulse width of 300 fs and 1 ps, pulse energy ranging from 0.1 μJ to 1.6 μJ, three different polarizations (circular, parallel and perpendicular) and number of overlapped pulses from 3 to 10,000 at 1030 nm with up to 2 MHz repetition rate to investigate their effect on nanogratings and one dimensional (1D) channel and two dimensional (2D) planar surface selective etching on 1 mm thick fused silica. In one configuration, we achieved 21.8 nm RMS surface roughness with 80 μm Gaussian filtering and in another configuration, we estimated the maximum writing speed to be 1.25 m/s for given 2 MHz repetition rate with less than 400 nm filtered root mean square (RMS) surface roughness at a 1 mm2 area which covers the thickness of the glass.
关键词： 3D microfabrication,Direct writing,Roughness,Chemical etching,Selectivity,Ultrafast laser
更新于2025-09-11 14:15:04
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[Energy, Environment, and Sustainability] Sensors for Automotive and Aerospace Applications || Fabrication Processes for Sensors for Automotive Applications: A Review
摘要： MEMS technology has revolutionized the industries of twenty-?rst century by combining the micromachining technology with the silicon microelectronics. The miniaturized devices produced from MEMS-based fabrication process have good adaptability and ?exibility due to its low power consumption and compactness. MEMS devices are hugely deployed for automobiles sectors like accelerometer, gyroscopes, pressure sensors, etc. These devices are fabricated through batch fabrication in industries, using various types of fabrication technologies. In this chapter, ?rst we have given an overview about MEMS. In the second section, we have given details about various kinds of materials which are utilized in the formation of sensors. In the third, fourth, and ?fth sections, in details, different lithographic, bulk, and surface micromachining techniques, and thin ?lm deposition techniques are discussed. At the last section, we have mentioned recent progress in MEMS-based processes, which are presently used mostly in atomic level for the fabrication of sensor and devices for automotive application.
关键词： Sensors,Microfabrication,MEMS,Actuators
更新于2025-09-10 09:29:36
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Piezoelectric Disc Transformer Modeling Utilizing Extended Hamilton's Principle
摘要： Piezoelectric transformers (PTs) are resonant electromechanical voltage conversion devices used in a variety of applications including voltage boosting and galvanic isolation. They offer advantages over electromagnetic voltage transformers (EMTs), including high energy density as well as the potential for monolithic fabrication, making them well suited to small-scale microelectromechanical (MEMS) applications. Among various PT topologies, circular discs lend themselves to microfabrication, and are considered here. In order to gain fundamental understanding of disc PT dynamics, this work applies the Extended Hamilton’s Principle of variational calculus to the piezoelectric electric enthalpy, using cylindrical coordinates, in order to derive electromechanical constitutive equations for bulk disc transformers. The use of the Hamilton approach in this work supports the integration of mechanical tethers that physically support the disc, allowing the model to be applied to device designs that are compatible with monolithic microfabrication from sheets of bulk piezoelectric material. Using the integrated model, voltage gain (output voltage / input voltage) is predicted as a function of multiple variables including electrode area ratio, device size, load impedance, and is compared against finite element numerical and experimental prototype results for verification. Prototype 4mm diameter tethered disc PTs on the order of .002cm3, two orders smaller than the bulk PT literature, were fabricated to validate the proposed model, and had peak voltage gains over 2.
关键词： Extended Hamilton’s Principle,Piezoelectric transformers,voltage conversion,MEMS,microfabrication
更新于2025-09-10 09:29:36
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An Improved Design and Versatile New Lamination Fabrication Method for Twin Electrode Thin Layer Cells Utilizing Track-Etch Membranes
摘要： Reported here are laminated membrane electrodes, an improved design and more advantageous method of fabrication for previously reported thin layer cell electrode systems developed on track-etch membranes. The laminated membrane approach potentially further improves flow resistance by dramatically reducing the surface area to volume ratio, but also produces a cohesive device that can be more readily applied to a broad range of applications. In addition, this new fabrication method was implemented in a scalable, commercial process and resulting product demonstrations indicate that volume manufacturing is feasible. Characterization of laminated membrane electrodes reveal redox cycling amplification factors as high as 30 with linear responses to variable concentrations of redox couple. These performance characteristics are shown to be comparable to similar generator-collector systems fabricated through much more laborious laboratory methods. This combination of added versatility, cost-reduced fabrication and exceptional performance clearly reveals unrealized potential of track-etch membrane approaches and boosts their candidacy as powerful new options for generator-collector electrode systems.
关键词： membrane,thin layer cell,redox cycling,generator-collector electrodes,microfabrication
更新于2025-09-10 09:29:36
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A demonstration of the mechanical sensing capability of individually contacted vertical piezoelectric nanowires arranged in matrices
摘要： This paper reports the fabrication of arrays of vertical piezoelectric nanowires which are individually contacted at their base, and demonstrates that an electrical response to strain can be obtained from individual nanowires from the array, without external biasing exploiting the piezotronic effect. Such a technology could thus be used for the fabrication of self-powered sensors for mechanical strain mapping, where each individually contacted nanowire would act as the strain sensing equivalent of a pixel. Lateral mapping resolutions in the micrometer range can be obtained. Here, the hydrothermal method was used to grow vertical ZnO nanowires selectively between two electrodes that had been patterned beforehand. For the sake of demonstration, nanowires deflection was produced by subjecting the array of nanowires to an incident lateral gas flow of controlled rate, which was switched on and off repeatedly across the sample while electrical response was measured. Different experimental configurations were tested in terms of flow rate, flow orientation, or nanowire position with respect to tube outlet. Experiments were carried out with compressed nitrogen and air. The experimental results are fully consistent with the piezoelectric and piezotronic response which can be expected with this geometry. Moreover, it is shown that the electrical response under nitrogen flow is a linear function of flow rate and that its sign provides information about flow direction. These results demonstrate the very promising prospects of this new technology for high-resolution mapping, with potential applications in gas or liquid flow sensing, fingerprints detection or human-machine interfaces.
关键词： Mechanical sensor,Piezotronics,Microfabrication,Strain mapping,ZnO nanowires
更新于2025-09-10 09:29:36
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Nano- and Microfabrication for Industrial and Biomedical Applications || Advanced microfabrication methods
摘要： The previous two chapters have discussed the philosophy of miniaturization and introduced the basic techniques. We will now further explain and broaden the microsystems technology (MST) engineering concept. In electronics, the discrete transistor replaced the vacuum tube in the 1960s. Since then, circuitry has been packed more and more densely onto the substrate. In fact, most of the effort into miniaturization was concerned with the development of novel fabrication methods, to allow manufacturing at the microscale of the next generation of devices. The reduction of size fitted the immediate purpose of the application: more calculation capacity in the same package. These devices became more portable, due to the reduction in their physical size and weight, and the inclusion of novel means of telecommunication. The development of cordless data transmitting systems was an important step towards the establishment of MST.
关键词： Biohybrid Devices,Microceramic Processing,Integrated Optics,Deep Reactive Ion Etching,microfabrication,LIGA,Planar Lightwave Circuits
更新于2025-09-09 09:28:46
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[ASME ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Quebec City, Quebec, Canada (Sunday 26 August 2018)] Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems - New Insights Into Shape Memory Alloy Bimorph Actuators Formed by Electron Beam Evaporation
摘要： In order to create shape memory alloy (SMA) bimorph microactuators with high-precision features, a novel fabrication process combined with electron beam (E-beam) evaporation, lift-off resist and isotropic XeF2 dry etching method was developed. To examine the effect of E-beam deposition and annealing process on nitinol (NiTi) characteristics, the NiTi thin film samples with different deposition rate and overflow conditions during annealing process were investigated. With the characterizations using scanning electron microscope and x-ray diffraction, the results indicated that low E-beam deposition rate and argon employed annealing process could benefit the formation of NiTi crystalline structure. Besides, SMA bimorph microactuators with high-precision features as small as 5 microns were successfully the thermomechanical performance was experimentally verified and compared with finite element analysis simulation results.
关键词： microfabrication,annealing,microactuators,bimorph,lift-off resist,electron beam evaporation,XeF2 dry etching,NiTi,x-ray diffraction,shape memory alloy
更新于2025-09-09 09:28:46
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Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers
摘要： Implementing dedicated and reliable biochemical recognition functionalities onto nanoelectromechanical systems (NEMS) is of primary importance for their development as ultra-sensitive and highly-integrated biosensing devices. In this paper, we demonstrate the large-scale and multiplexed integration of molecularly imprinted polymers (MIPs) as highly stable biomimetic receptors onto arrays of nanocantilevers. Integration is carried out by spin-coating and photopatterning the polymer layers before releasing the nanostructures. We demonstrate that these biomimetic layers are robust enough to withstand the wet-etch of the sacrificial layer making this functionalization strategy compatible with further MEMS/NEMS processing. As a proof of concept, we fabricate NEMS resonators coated with a MIP using Boc-L-phenylalanine (Boc-L-Phe) as the template molecule. We demonstrate the preserved molecular recognition ability of the patterned sensitive layer through the fluorescence detection of dansyl-L-phenylalanine (dansyl-L-Phe), a fluorescent derivative of the template, and the mechanical integrity of the resonators by means of resonant frequency measurements.
关键词： Sensor,Molecularly Imprinted Polymer,Photolithography,Microfabrication,NanoElectroMechanical Systems
更新于2025-09-04 15:30:14
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Transparent Thin Film Solid-state Lithium Ion Batteries
摘要： Transparent electrochemical energy storage devices have attracted extensive attention for the power supply of next-generation transparent electronics. In this paper, semi-transparent thin film batteries (TFBs) with a grid-structured design have been fabricated on glass substrates using specific photolithography and etching processes in order to achieve LiCoO2/LiPON/Si structures below human eye resolution. UV-vis transmittance up to 60% have been measured for the obtained TFBs. Discharge capacity as high as 0.15 mAh has been recorded upon galvanostatic cycling at C/2 rate within 4.2-3 V voltage range for the highest transmittances. The capacity variation trend exhibits an initial phase of a gradual decrease with an average capacity loss of 0.15% per cycle, and thereafter a second phase with almost stable capacity. Particular attention has been given to the effects of architecture parameters on the TFB optical and electrochemical properties. To the best of our knowledge, this work is the first demonstration of transparent, all inorganic, thin film lithium-ion batteries. While reported studies are limited to battery structures involving liquid or polymer materials, our devices will contribute to improve form factor freedom, extend operating ranges, enhance long-term stability, and will be relevant to the integration into various optoelectronic devices.
关键词： solid state,LiPON,thin film,microfabrication,transparent battery
更新于2025-09-04 15:30:14