34.1: <i>Invited Paper:</i> Oxide TFT Development for 8K4K AMLCDs and High Resolution AMOLEDs

摘要： Back channel etched (BCE) structure TFTs have been developed for larger LCD TVs with higher resolution. We developed 5 mask 85 inch 8K4K AMLCDs, and now are focusing on the 4 mask process. For high resolution OLED TVs, self-aligned coplanar structure TFTs have been developed to reduce the parasitic capacitance. We have been developing low resistive Cu-based self-aligned coplanar TFT for 4K2K top emission (T/E) ink jet printing (IJP) AMOLEDs.