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[Lecture Notes in Electrical Engineering] Sensors Volume 539 (Proceedings of the Fourth National Conference on Sensors, February 21-23, 2018, Catania, Italy) || Portable Optoelectronic System for Monitoring Enzymatic Chemiluminescent Reaction
摘要： This work presents a portable lab-on-chip system, based on thin film electronic devices and an all-glass microfluidic network, for the real-time monitoring of enzymatic chemiluminescent reactions. The microfluidic network is patterned, through wet etching, in a 1.1 mm-thick glass substrate that is subsequently bonded to a 0.5 mm-thick glass substrate. The electronic devices are amorphous silicon p-i-n photosensors, deposited on the outer side of the thinner glass substrate. The photosensors, the microfluidic network and the electronic boards reading out the photodiodes' current are enclosed in a small metallic box (10 × 8 × 15 cm3) in order to ensure shielding from electromagnetic interferences. Preliminary tests have been performed immobilizing horseradish peroxidase on the inner wall of the microchannel as model enzyme for detecting hydrogen peroxide. Limits of detection and quantification equal to 18 and 60 μM, respectively, have been found. These values are comparable to the best performances reported in literature for chemiluminescent-based optofluidic sensors.
关键词： Amorphous silicon,Photosensors,Enzymatic reactions,Anodic bonding,Horseradish peroxidase,Microfluidics
更新于2025-09-19 17:15:36
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An Analytical Method for Modelling Pull-In Effect during Anodic Bonding
摘要： Pull-in effect is a common phenomenon during anodic bonding, a key step in the fabrication processes of capacitive sensors and actuators. To assist the designs and fabrications of these transducers, this paper presents an analytical method for modelling the pull-in effect during anodic bonding. The pull-in effect model was verified by finite element analysis and a verification experiment respectively. The verification results indicate that the analytical method for modelling the pull-in effect during anodic bonding is capable for predicting pull-in voltages of anodically bonded capacitive sensors and actuators in a universal and practical manner without any additional fabrication process.
关键词： pull-in effect,capacitive transducer,anodic bonding
更新于2025-09-04 15:30:14