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[Springer Theses] Electrical Properties of Indium Arsenide Nanowires and Their Field-Effect Transistors || Fabrication, Characterization and Parameter?Extraction of InAs Nanowire-Based Device
摘要： Nanofabrication, low noise electrical measurement and various nanoscale characterization methods are frequently used in the study. This chapter will give as introduction on the growth method, fabrication techniques, characterization methods of materials and devices, measurement systems, and way to extract the electrical parameters of InAs nanowires FET devices.
关键词： Parameter extraction,Fabrication of nanowire devices,Electrical measurement,Structural characterization
更新于2025-09-23 15:21:21
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[IEEE 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Paris, France (2018.7.8-2018.7.13)] 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Nano - Microscale Electrical Characterization of Copper Thru Silicon Vias in 3D Stacked Integrated Circuits
摘要： This paper describes the implementation of techniques and systems for different electrical measurements operating at nano and micro scales for the electrical characterization of copper filled Thru Silicon Vias used for 3D integrated circuits interconnects and defect detection in such vias.
关键词： nanoscale,3D integrated circuits,scanning microwave,thru silicon via,setup,atomic,electrical measurement,microscope,force,microscale,four-probe
更新于2025-09-10 09:29:36