- 标题
- 摘要
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- 实验方案
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A Monolithic Gimbal Micro-Mirror Fabricated and Remotely Tuned with a Femtosecond Laser
摘要： With the advent of ultrafast lasers, new manufacturing techniques have come into existence. In micromachining, the use of femtosecond lasers not only offers the possibility for three-dimensional monolithic fabrication inside a single optically transparent material, but also a means for remotely, and arbitrarily, deforming substrates with nanometer resolution. Exploiting this principle and combining it with flexure design, we demonstrate a monolithic micro-mirror entirely made with a femtosecond laser and whose orientation is tuned in a non-contact manner by exposing some part of the device to low energy femtosecond pulses. Given the non-contact nature of the process, the alignment can be very precisely controlled with a resolution that is many orders of magnitude better than conventional techniques based on mechanical positioners.
关键词： femtosecond laser machining,tunable optics,repositioning,integrated optics,monolithic,micro-optics,non-contact,fused silica,flexures
更新于2025-09-12 10:27:22
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MICRO WAVE PATTERNS BY VIBRATING-LENS ASSISTED LASER MACHINING
摘要： Surfaces with superimposed patterns offer, in many applications, numerous advantages over traditional smooth surfaces since they profoundly affect functional behavior, e.g., friction, wettability, etc. Different shapes and sizes of surface patterns were fabricated by traditional laser machining, however, micro wave patterns are difficult to generate by this process. In this paper, vibrating-lens assisted laser machining is proposed to generate such patterns and to extend its capabilities. A model, based on the traditional heat-flow principle, was built to ascertain the energy distribution in the process and predict the shape of the wavy patterns generated. A specially developed experimental setup was used for model validation. Sinusoidal wave patterns were analyzed as an example to demonstrate geometrical feature under different parameters and the feasibility of the process. The feasibility of the proposed theoretical and experimental methodologies was illustrated through a comparative analysis of experimental and simulation scenarios.
关键词： Pattern simulation,Surface topography,Vibrating-lens,Laser machining,Traditional heat-flow principle
更新于2025-09-11 14:15:04
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A study on film hole drilling of IN718 superalloy via laser machining combined with high temperature chemical etching
摘要： A novel method of laser machining combined with high temperature chemical etching (LMHTCE) was proposed. This novel method can take full advantage of both approaches to drill film holes in an IN718 superalloy without a recast layer or a heat affect zone (HAZ). A solution of hydrochloric acid and sodium nitrate, which minimally reacts with IN718 at room temperature but rapidly reacts under high temperatures, was tested and chosen. Holes drilled in air, water, and chemical solutions by a pulsed laser of 1064 nm were studied, and scanning electron microscope (SEM) and energy dispersive spectrometer (EDS) were employed to detect the morphology of the holes and the elemental distribution in different zones. The holes processed in the chemical solution had fewer defects compared with those in the other two mediums. The defocusing distance parameter was optimized to minimize the hole diameter and taper. When the defocusing distance was 0 μm in the drilling stage and ? 60 μm in the high temperature chemical etching stage, a hole with a smaller diameter and taper can be obtained.
关键词： High temperature chemical etching,Laser machining,Film holes,IN718
更新于2025-09-11 14:15:04