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过滤筛选
- 2018
- Multi-input and multi-output
- half adder
- DEMUX
- electrostatic and electrothermal actuation
- MEMS resonators
- Optoelectronic Information Science and Engineering
- King Abdullah University of Science and Technology
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A Large Range of Motion 3D MEMS Scanner With Five Degrees of Freedom
摘要： Here, we discuss a novel, mixed mode 3D XYZ scanner built within a single foundry process. The device has a large range of motion in X, Y, and Z (14.1 μm in X and Y and 97.9 μm in Z) and can also rotate about two axes (7.4°), making it a 5 degree of freedom scanner. Vertical actuation can be accomplished with both thermal actuators, which have a larger range of motion, and capacitive actuators, which are faster, responding fully up to 3.2 kHz. Although useful for many applications, including scanning probe microscopy, micrometer scale optical microscopy, and manipulation of biological objects, the device was designed to be a 3D scanner for spray-painting atoms upon a surface with nanoscale precision and resolution for nanofabrication. Demonstrating the ability to combine the device with other complicated MEMS systems, it is integrated with an XY scanner designed to serve as a shutter of atomic flux. The full system has 7 degrees of freedom and 12 actuation motors, and because it is built in a low cost commercial foundry with a robust and stable process, it is easy and inexpensive to fabricate multiple copies or integrate into other complicated systems, making a system of systems.
关键词： electrostatic actuators,thermal actuators,Comb drive,nanopositioning,position control,MEMS
更新于2025-09-23 15:22:29
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[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - A Pyroelectric Infrared Detector By Integrating LiTaO<inf>3</inf> Single Crystal with Grooved Quartz Using UV Adhesive
摘要： A new pyroelectric infrared detector structure has been fabricated by integrating LiTaO3 single crystal with air gap thermal insulation structure using MEMS technology. The device shows excellent pyroelectric properties and thermal performance. Results demonstrate that the pyroelectric performance of detectors with air gap thermal insulation structure can be improved by the area of air gap. It was demonstrated that if the area of air gap got increased, the thermal time constant of LiTaO3 bulk would be more well-distributed and the pyroelectric performance of detector would be improved.
关键词： air gap,MEMS,pyroelectric infrared detector,thermal insulation,LiTaO3
更新于2025-09-23 15:22:29
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[IEEE 2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) - Gdynia, Poland (2018.6.21-2018.6.23)] 2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) - Optimization of Class-D Amplifier Output Stage for Piezoelectric Actuator Control
摘要： Design of a piezoelectric driver for a microelectromechanical actuator in a small form factor for laser telecommunications is introduced. The driver introduces a number of challenges due to its size and power limitations as a Microelectromechanical Systems (MEMS) actuator. Because of the small form factor, the driver must be integrated into the actuator itself, which limits its size and power. The efficiency of a linear amplifier becomes a major drawback due to the dissipated heat of only 20 W for the Laser Telecommunications Module (LTM), low efficiency of a linear amplifier becomes a major drawback due to the dissipated heat. Switching Class-E amplifiers provide exceptional efficiency compared to non-switching solutions at a price of high frequency harmonics, which allows for higher output power without additional heat dissipation. The efficiency, however, comes at a price of high frequency harmonics, which must be reduced by implementing a High-Energy-Efficiency Interference (HEEI) and Total Harmonic Distortion (THD). Driving a capacitive load, such as a piezoelectric actuator, at a high frequency with a Class-E amplifier requires a matching network to achieve the desired output power. The measurements were performed on a custom-made driver model for piezoelectric stack actuators with 270 V peak-to-peak voltage, 500 kHz switching frequency and a range of capacitive load from 2.1 nF to 20 nF.
关键词： Actuator,Driver,Amplifier,Distortion,LTM.2,Output Stage,SMPS,Class-E,Total,LTM,THD,MEMS,Harmonic,Transmission,Telecommunications,Laser,Module,High-Energy-Efficiency,HEEI,Interference,Piezoelectric,Microelectromechanical
更新于2025-09-23 15:22:29
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Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
摘要： Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier properties and biocompatibility. In the past few decades, the adaptation of planar microfabrication processes to thin film Parylene C has encouraged its use as an insulator, structural and substrate material for MEMS and other microelectronic devices. However, Parylene C presents unique challenges during microfabrication and during use with liquids, especially for flexible, thin film electronic devices. In particular, the flexibility and low thermal budget of Parylene C require modification of the fabrication techniques inherited from silicon MEMS, and poor adhesion at Parylene-Parylene and Parylene-metal interfaces causes device failure under prolonged use in wet environments. Here, we discuss in detail the promises and challenges inherent to Parylene C and present our experience in developing thin-film Parylene MEMS devices.
关键词： MEMS,Parylene,microfabrication
更新于2025-09-23 15:21:21
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[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Preliminary imaging in miniature MEMS electron microscope
摘要： A preliminary imaging concept in a miniature MEMS electron microscope is presented. The setup of the measurements is described and the mechanism of the imaging process is explained. Authors present also results of simulations and measurements concerning electron beam passing through thin silicon nitride membrane. The scattering angle of the electron beam is calculated. This parameter is both advantage and disadvantage for the imaging process. Preliminary (the first) image of copper wire placed over the membrane is presented.
关键词： miniature TEM,electron detection,imaging,MEMS
更新于2025-09-23 15:21:21
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[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - The stable and long lifetime planar field emission cathode made of a CNT ink
摘要： We present the planar cathode that is dedicated for the miniaturized transmission electron microscope, which all components are fabricated based on MEMS Si-glass technology processes. The cathode is made of a commercial CNT ink without addition of fillers, and results in the stable and long lifetime field emission of electrons.
关键词： planar cathode,MEMS,field emission,CNT ink,TEM
更新于2025-09-23 15:21:21
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[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Dynamically stabilized high vacuum inside MEMS optical cells for atomic spectroscopy
摘要： Self-pumping high-vacuum MEMS optical cell for Cs/Rb atomic spectroscopy is presented for the first time ever. The MEMS alkali vapor cell and ion sorption micropump have been integrated forming unique, probably first in the World solution allows to generate high vacuum and introduce alkali atoms on chip. The vacuum level on 10-6 Torr has been dynamically stabilized in the presence of rubidium vapors continuously introduced from solid-state dispenser. Achieved results opens a new possibility to fabricate new class of optical cells for atomic spectroscopy.
关键词： high vacuum MEMS,atomic spectroscopy,alkali cell
更新于2025-09-23 15:21:21
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Reference Module in Materials Science and Materials Engineering || Wafer Bonding
摘要： Wafer bonding has been an important and critical technology in the development of micromachined sensors, actuators, microsystems, and their packaging for many decades. It is also being used in the fabrication of integrated circuits (ICs) and the formation of composite materials and wafers needed in advanced circuit technologies. Wafer, or die, bonding refers to the process whereby two or more wafers of similar or dissimilar materials are, often permanently, attached or bonded together. The individual wafers might have already been through previous fabrication steps to form various features on them, or might just be plain wafers.
关键词： Wafer Bonding,Microsystems,ICs,Packaging,MEMS
更新于2025-09-23 15:21:21
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Application of rubrene air-gap transistors as sensitive MEMS physical sensors
摘要： Micro electromechanical systems (MEMS) made of organic materials have attracted efforts on development a new generation of physical, chemical and biological sensors, for which the electromechanical sensitivity is the current major concern. Here, we present an organic MEMS made of a rubrene single crystal air-gap transistor. Applying mechanical pressure on the semiconductor results in high variations of drain current: an unparalleled Gauge factor above 4000 has been measured experimentally. Such a high sensitivity is induced by the modulation of charge injection at the interface between the gold electrode and the rubrene semiconductor as an unusual transducing effect. Applying these devices to the detection of acoustic pressure shows that force down to 230 nN can be measured with a resolution of 40 nN. This study demonstrates that MEMS based on rubrene air-gap transistors constitute a step forward to the development of high performance flexible sensors.
关键词： crystal,charge injection,organic MEMS,pressure sensor,air-gap transistor,OFET,rubrene
更新于2025-09-23 15:21:21
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[IEEE 2019 22nd International Conference on Computer and Information Technology (ICCIT) - Dhaka, Bangladesh (2019.12.18-2019.12.20)] 2019 22nd International Conference on Computer and Information Technology (ICCIT) - Enhancement of Conversion Efficiency of CdS-CdTe Photovoltaic Cell Sandwiching Intrinsic CdTe Layer between Window and Absorber Layers
摘要： Studies involving turbulent flow have been carried out in many parts of the cardiovascular system, and it has been widely reported that turbulence related to stenosis (narrowing) of arteries creates audible sounds, which may be analyzed to yield information about the nature and severity of the blockage. Results so far indicate that the high frequency content of the sounds generally increases with the degree of stenosis. In this paper, we designed and built an MEMs microphone array and a signal acquisition board to improve the detection of coronary occlusions using an approach based on the recording and analysis of isolated diastolic heart sounds associated with turbulent blood flow in occluded coronary arteries. The nonlinear dynamic analysis method based on approximate entropy has been proposed for the analysis of diastolic heart sounds from patients with single coronary occlusions, before and after stent placement procedures. The nonlinear dynamic analysis (approximate entropy) measures of the diastolic heart sounds recorded from eight patients with single coronary occlusions and two normal subjects were estimated. In addition, a spectral analysis based on the fast Fourier transform was used to estimate the energy content of the recorded signals. Results suggest the presence of high nonlinear (approximate entropy) values of diastolic heart sounds associated with coronary artery disease (p < 0.01) as well as significant differences in the energy content of the heart sound signals above and below 150 Hz (p < 0.05).
关键词： MEMs microphone array,approximate entropy,nonlinear dynamics analysis,Coronary artery disease
更新于2025-09-23 15:21:01