Nano- and Microfabrication for Industrial and Biomedical Applications || Micromechanical transducers

摘要： Miniaturized micromechanical-based transducers are applied in many various scientific communities and industries. In this chapter we look into the basic concepts of this extensive and important category of devices using simple components as examples. Transducers come in such extreme diversity that a descriptive overview such as is provided by this book is best taken from the perspective of the user. One of the most easily understood definitions of transducers is that they convert energy from one form into another. This perspective also shows that there is no one single design rule. The designer needs to start from a range of actual conditions to realize the required transduction principle in a given application.