- 标题
- 摘要
- 关键词
- 实验方案
- 产品
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Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology || Large-Area Nanoimprint Lithography and Applications
摘要： Large-area nanoimprint lithography (NIL) has been regarded as one of the most promising micro/nano-manufacturing technologies for mass production of large-area micro/nanoscale patterns and complex 3D structures and high aspect ratio features with low cost, high throughput, and high resolution. That opens the door and paves the way for many commercial applications not previously conceptualized or economically feasible. Great progresses in large-area nanoimprint lithography have been achieved in recent years. This chapter mainly presents a comprehensive review of recent advances in large-area NIL processes. Some promising solutions of large-area NIL and emerging methods, which can implement mass production of micro- and nanostructures over large areas on various substrates or surfaces, are described in detail. Moreover, numerous industrial-level applications and innovative products based on large-area NIL are also demonstrated. Finally, prospects, challenges, and future directions for industrial scale large-area NIL are addressed. An infrastructure of large-area nanoimprint lithography is proposed. In addition, some recent progresses and research activities in large-area NIL suitable for high volume manufacturing environments from our Labs are also introduced. This chapter may provide a reference and direction for the further explorations and studies of large-area micro/nano patterning technologies.
关键词： roller-type NIL,large-area micro/nano patterning,roll-to-roll NIL,large-area nanoimprint lithography,full wafer NIL,roll-to-plate NIL
更新于2025-09-19 17:15:36
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Crystal Engineering of Organic Optoelectronic Materials
摘要： Crystal engineering can be regarded as the highly ordered and complicated supramolecular synthesis of functional crystalline solids by control of intermolecular interactions. As one of the most important organic solids for crystal engineering, organic optoelectronic materials have received tremendous interest in the past several decades. In this review, we discuss systematically how to design organic optoelectronic materials from the perspective of crystal engineering including molecular structures, intermolecular interactions, packing arrangements, crystal growth, and patterning methods as well as two-component and multi-component molecular materials. We underline the correlations among molecular structures, packing modes, crystal morphologies, and optoelectronic properties. Finally, we address several key points for further exploration in this field.
关键词： Crystal Growth,Intermolecular Interactions,Crystal Engineering,Patterning Methods,Organic Optoelectronic Materials,Packing Arrangements
更新于2025-09-19 17:13:59
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Patterned arrays of assembled nanoparticles prepared by interfacial assembly and femtosecond laser fabrication
摘要： Creating shape-defined structures of inorganic nanoparticles in a maskless and template-free fashion would advance the engineering of nanoparticle-based devices and structures with desired configurations for various applications. In this work, a novel fabrication protocol combining bottom-up interfacial assembly and subtractive laser patterning was developed for creating patterned arrays of assembled nanoparticles. A solid film of magnetic nanoparticles (10 nm, monodisperse CoFe2O4) was assembled as a nanoparticle film (thickness less than 100 nm) on liquid interface under guiding field, and it was further transferred to Si substrate followed by selective material removal using femtosecond laser pulses, producing patterned arrays (typical size of 3 μm) of assembled nanoparticles. The size, shape, and arrangement of the patterned arrays were finely regulated by adjusting the laser pulse energy and laser scanning path. The magnetization behavior and magnetic anisotropy of the patterned arrays differ from those of the nanoparticle-assembled film, as reflected by the changes of coercivity and squareness along the out-of-plane direction. The presented fabrication protocol is compatible with microelectronic fabrication techniques and can be applied to various inorganic nanoparticles.
关键词： Magnetic properties,Femtosecond laser fabrication,Interfacial assembly,Nanoparticle patterning,Collective properties
更新于2025-09-19 17:13:59
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Fabrication and study of self-assembled NiO surface networks assisted by Sn doping
摘要： Complex pattering of surfaces commonly requires a significant effort in terms of time, cost, and advanced post-fabrication treatments design, which could be overcome by self-organization mechanisms avoiding damage to the surface materials and enhancing properties of interest. In the present work, grid self-assembled NiO complex surfaces have been fabricated assisted by Sn incorporation during growth, following thermal treatments at 1400 oC under a controlled Ar flow. The singular morphologies achieved enable the fabrication of robust high surface to volume ratio surfaces with a wide range of surface properties and functionalities. Based on the research performed by a set of complementary techniques, the mechanisms involved in the formation of these textured surfaces have been discussed and some of the fundamental electronic and optical properties of NiO have been analyzed, both aspects necessary to head up the potential development of applications based on this p-type material which is arousing growing attention. These singular micro- and nanostructures present high luminescence and tunable performance unusual to bulk NiO samples, which can broaden the applicability of this material to light-emitting devices. Moreover, the surface evolution depends on a controllable way on the preferential state of charge of the incorporated Sn, which could be selected through the convenient Sn-based precursor, its ratio to the metallic Ni starting precursor, and the atmosphere and duration of the fabrication treatment. Finally, in order to assess the dependence of some potential NiO-based applications on the insights achieved on the surface characterization, the gas-sensing response to ethanol from the Sn doped NiO samples was also evaluated. The study of the processes and mechanisms involved in the growth of these grid-patterned surfaces can be extended to similar oxide-based systems.
关键词： Surface-patterning,luminescence,NiO
更新于2025-09-19 17:13:59
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27.2: <i>Invited Paper:</i> High resolution FMM process for AMOLED displays
摘要： Fine metal mask (FMM) is one of the biggest hurdles to realize high resolution AMOLED displays for smartphone and virtual reality (VR). Various kinds of the material and processing technologies for high resolution FMMs are discussed.
关键词： Invar,Chemical Etching,VR (Virtual Reality),Electroforming,Laser patterning,FMM (Fine Metal Mask),UHD (Ultra High Definition),AMOLED
更新于2025-09-19 17:13:59
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[IEEE 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) - Chicago, IL, USA (2019.6.16-2019.6.21)] 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) - Direct Laser Patterned Electroplated Copper Contacts for Interdigitated Back Contact Silicon Solar Cells
摘要： Laser patterning of seed layers for Cu electroplated interdigitated contacts on Ni/a-SiNx:H/Si substrates is presented. Damage was controlled by varying the laser conditions. Cu growths shorted the contacts due to conductive residues in the scribe lines, but were attenuated with pre-deposition etching yielding electrically-isolated plated fingers. Parasitically-plated Cu stripes were now observed in laser cuts, postulated due to Cu nucleation from high current densities at pinholes originating from laser and etch damage to the resistive a-SiNx:H. While a promising approach for contact processing, laser conditions must be carefully optimized to minimize substrate damage.
关键词： photovoltaic cells,interdigitated back contacts,copper electrodeposition,laser patterning,silicon
更新于2025-09-19 17:13:59
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Ultrashort Pulsed Laser Surface Patterning of Titanium to Improve Osseointegration of Dental Implants
摘要： Ultrashort pulsed direct laser interference patterning (DLIP) is used to generate hierarchical line-like patterns on titanium surfaces to control cell adhesion and spreading on dental implants, thereby improving osseointegration. The DLIP structures have spatial periods of 3, 5, 10, and 17 μm. They are produced using a laser source with a pulse duration of 10 ps and cumulated energy densities between 0.1 and 78.9 J cm?2. Laser-induced periodic surface structures (LIPSS) and submicron features are obtained on the treated samples. The DLIP treatment leads to the development of a thick titanium oxide layer, which is imaged and quantified using time-of-flight secondary ion mass spectrometry (ToF-SIMS). Several days (30–56) after the laser treatment, specimens with larger spatial periods are hydrophilic, whereas samples with spatial periods of 3 μm are hydrophobic. Seeded human osteoblasts on the laser-structured samples show 2.5 times higher cell numbers after 7 days in vitro culture compared with osteoblasts on a grit-blasted and etched reference sample. Finally, cell adhesion to a structured 3D dental implant is demonstrated.
关键词： dental implants,surface functionalization,direct laser interference patterning,osseointegration,titanium
更新于2025-09-19 17:13:59
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Dynamic Multifocus Laser Writing with Acousto‐Optofluidics
摘要： Laser writing of materials is normally performed by the sequential scanning of a single focused beam across a sample. This process is time-consuming and it can severely limit the throughput of laser systems in key applications such as surgery, microelectronics, or manufacturing. A parallelization strategy based on ultrasound waves in a liquid to diffract light into multiple beamlets is reported. Adjusting amplitude, frequency, or phase of ultrasound allows tunable multifocus distributions with sub-microsecond control. When combined with sample translation, the dynamic splitting of light leads to high-throughput laser processing, as demonstrated by locally modifying the morphological and wettability properties of metals, polymers, and ceramics. The results illustrate how acousto-optofluidic systems are universal tools for fast multifocus generation, with potential impact in fields such as imaging or optical trapping.
关键词： complex patterning,laser ablation,high throughput processing,wettability
更新于2025-09-19 17:13:59
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Laser-Assisted Fabrication of a Highly Sensitive and Flexible Micro Pyramid-Structured Pressure Sensor for E-Skin Applications
摘要： A novel capacitive pressure sensor based on micro-structured polydimethylsiloxane (PDMS) dielectric layer was developed for wearable E-skin and touch sensing applications. The pressure sensor was fabricated on a flexible polyethylene terephthalate (PET) substrate, using PDMS and silver (Ag) as the dielectric and electrode layers, respectively. A set of PDMS films with pyramid shaped micro-structures were fabricated using a laser engraved acrylic mold. The electrodes (top and bottom) were fabricated by depositing Ag on PET films using additive screen-printing process. The pressure sensor was assembled by attaching the top and bottom Ag electrodes to the smooth side of pyramid shaped micro-structured PDMS (PM-PDMS) films. The top PM-PDMS was then placed on the bottom PM-PDMS. The capability of the fabricated pressure sensor was investigated by subjecting the sensor to pressures ranging from 0 to 10 kPa. A sensitivity of 0.221% Pa-1, 0.033% Pa-1 and 0.011% Pa-1 along with a correlation coefficient of 0.9536, 0.9586 and 0.9826 was obtained for the pressure sensor in the pressure range of 0 Pa to 100 Pa, 100 Pa to 1000 Pa, and 1 kPa to 10 kPa, respectively. The pressure sensor also possesses a fast response time of 50 ms, low hysteresis of 0.7%, recovery time of 150 ms and excellent cycling stability over 1000 cycles. The results demonstrated the efficient detection of pressure generated from various activities such as hand gesture and carotid pulse measurement. The PM-PDMS based pressure sensor offers a simple and cost-effective approach to monitor pressure in E-skin applications.
关键词： E-skin,Laser patterning,Pressure sensor,Micro-pyramid structure,Polydimethylsiloxane (PDMS),Screen printing process,Polyethylene terephthalate (PET)
更新于2025-09-19 17:13:59
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High‐precision alignment procedures for patterning processes in solar cell production
摘要： We present two approaches for high-accuracy aligning of patterning processes with each other when fabricating solar cells. We introduce the approaches on the example of two different patterning processes of which one is adjustable (laser process) and one is not adjustable (screen-printing process). The basic idea is to measure the coordinates of the applied structures of each involved patterning process at discrete grid points with respect to a reference coordinate system. We chose the grid points such that they completely define the final cell pattern. Then, we adjust the grid point coordinates of one of the patterning processes (the laser process) according to the pattern of the other process (the screen-printing process). The laser then performs the patterning by connecting the corrected grid points with each other in the desired direction. We perform the associated high-precision measurement of the patterns' coordinates by using either a high-precision offline coordinate measuring machine or a high-resolution inline camera system with subsequent computer-based data processing. The latter inline method enables high throughput and is, in turn, of great interest for mass production of solar cells. In this paper, we demonstrate the alignment procedure approaches on “pPassDop” solar cells by adjusting a locally applied laser process to the directly following screen-printing step. This proof of principle includes both above-mentioned methods for coordinate determination in separate cell batches. Our innovative alignment procedures so far demonstrated the successful matching of 40-μm-wide screen-printed contact fingers to 70-μm-wide laser-processed lines over the entire area of 6-inch solar cells.
关键词： PERL,coordinate correction,silicon solar cells,patterning processes,selective emitter,PERC,bifacial,alignment,screen printing,pPassDop,laser
更新于2025-09-16 10:30:52