Fiber Optic Fabry-Perot Pressure Sensor with Embedded MEMS Micro-Cavity for Ultra-High Pressure Detection

摘要： we demonstrate a fiber-optic Fabry-Perot pressure sensor with embedded MEMS micro-cavity for ultra-high pressure detection. The embedded type structure (ETS) is first proposed and analyzed to meet the requirements of ultra-high pressure detection. The geometry parameters of sensor have been optimized by analyzing mechanical and optical characteristics. From the analysis results based on the ETS, an ultra-high pressure sensor is fabricated and experimentally demonstrated for ultra-high pressure detection. The ultra-high pressure experiment illustrated response relationship between the absolute phase and pressure in the range of 2~120MPa, and full-scale errors less than 0.079%F.S. at room temperature. The other characteristics index of sensor, such as pressure sensitivity, hysteresis error, temperature’s influence factor are superior to rad/ ℃ . The transient response time of system is 0.27s. The sensor can be used for ultra-high pressure detections, which is necessary in deep-sea and oil exploration.