- 标题
- 摘要
- 关键词
- 实验方案
- 产品
-
Detailed investigation of photoluminescence, structural, and elemental properties of ZnO thin films under various annealing ambient
摘要： Zinc oxide (ZnO) has extensively exploited the material in the field of optoelectronics due to its inherent wide bandgap and high electron mobility. Properties of ZnO is very sensitive to its deposition methods and conditions. We report the effect of annealing ambient (i.e. argon, nitrogen, oxygen, or vacuum) on the optical, structural and elemental properties of the RF-sputtered ZnO thin films. In this work, we have performed compressive study on the effects of annealing ambient on a donor-bound exciton peak, exciton-exciton and electron-exciton scattering using low temperature (18 K) photoluminescence measurement which is not yet well understood. We have reported dominant on the donor-bound exciton peak with the lowest full width half maximum value (~4.48 nm) for annealing in an oxygen ambient. The annealing ambient strongly influenced the elemental properties of the film and we have reported the reduction in oxygen vacancy with annealing in an oxygen ambient. This work showed that the influence of ex-situ annealing ambient on exciton emission of ZnO thin films and thus providing a tool for enhancing the optical and elemental properties of the film.
关键词： ZnO thin films,Radio-frequency sputtering,X-ray photoelectron spectroscopy,Rapid thermal processing,Photoluminescence
更新于2025-09-23 15:19:57
-
A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films
摘要： A great part of interest has been paid for fabricating new materials with novel mechanical, optical, and electrical properties. Boron carbon nitride (BCN) ternary system was applied for variable bandgap semiconductors and systems with extreme hardness. The purpose of this literature review is to provide a brief historical overview of B4C and BN, to review recent research trends in the BCN synthesizes, and to summarize the fabrication of BCN thin films by plasma sputtering technique from B4C and BN targets in different gas atmospheres. Pre-set criteria are used to discuss the processing parameters affecting BCN performance which includes the gasses flow ratio and effect of temperature. Moreover, many characterization studies such as mechanical, etching, optical, photoluminescence, XPS, and corrosion studies of the RF sputtered BCN thin films are also covered. We further mentioned the application of BCN thin films to enhance the electrical properties of metal-insulator-metal (MIM) devices according to a previous report of Prakash et al. (Opt. Lett. 41, 4249, 2016).
关键词： Radio frequency sputtering,Gas flow ratio,Boron carbon nitride,Metal-insulator-metal device
更新于2025-09-04 15:30:14