- 标题
- 摘要
- 关键词
- 实验方案
- 产品
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A Novel Hybrid Removal Technology for High-Aspect-Ratio SU-8 Micromolds in ECF (Electro-Conjugate Fluid) Micropumps Fabrication by UV-LIGA
摘要： Previously, we have developed ECF micropumps with triangular prism and slit electrode pairs (TPSEs) fabricated by the UV-LIGA. However, the previous KMPR molds have a limit to attain higher-aspect-ratio TPSEs. As a promising substitute, the ultrathick SU-8 molds are preferable for the TPSEs due to higher-aspect-ratio ability, but their difficult removal remains an annoying problem. To solve this problem, we first propose a novel hybrid removal method combining CO2 laser engraving with O2/CF4 plasma to achieve the fast, non-swelling, and complete removal of ultrathick SU-8 micromolds for higher-aspect-ratio TPSEs. The CO2 laser engraving is utilized as the main process to remove most SU-8, while the O2/CF4 plasma is adopted as the post-treatment to remove the remaining SU-8. To gather the proper fabrication conditions, we quantitatively analyze the effects of laser power, laser scan speed, and laser-pass numbers on the SU-8 ablation thickness. We successfully fabricated TPSEs of 590 μm and 970 μm in height by selectively removing SU-8 micromolds of 620 and 1100 μm in thickness. This achievement confirmed that our hybrid removal technology could remove the crosslinked SU-8 effectively and efficiently. We further experimentally proved the fascinating potential of our hybrid removal in improving the output performance of ECF micropumps. This promising hybrid removal opens the door to the easier fabrication of ultrathick metallic microstructures by UV-LIGA.
关键词： high aspect ratio,ECF micropump,CO2 laser engraving,SU-8 removal,triangular prism & slit electrode pair
更新于2025-09-23 15:22:29
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Double-slit photoelectron interference in strong-field ionization of the neon dimer
摘要： Wave-particle duality is an inherent peculiarity of the quantum world. The double-slit experiment has been frequently used for understanding different aspects of this fundamental concept. The occurrence of interference rests on the lack of which-way information and on the absence of decoherence mechanisms, which could scramble the wave fronts. Here, we report on the observation of two-center interference in the molecular-frame photoelectron momentum distribution upon ionization of the neon dimer by a strong laser field. Post-selection of ions, which are measured in coincidence with electrons, allows choosing the symmetry of the residual ion, leading to observation of both, gerade and ungerade, types of interference.
关键词： double-slit interference,photoelectron momentum distribution,strong-field ionization,neon dimer,molecular frame
更新于2025-09-23 15:22:29
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Two-slit experiment with two screens
摘要： The scheme of the two-slit experiment with two screens is considered. There is an opening in the first screen which may be open or blocked. The first screen shows an interference pattern while the second screen serves a which way detector. The arrangement may be considered as a variant of the delayed-choice experiment in the classical configuration.
关键词： Delayed-choice experiment,Two-slit experiment
更新于2025-09-23 15:22:29
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[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Wafer-Scale Fabrication of V-Shaped Silicon Nano-Slit Arrays
摘要： This paper presents a strategy of fabricating v-shaped nano-slit arrays in silicon substrates at wafer scale, by using a three-step wet anisotropic etching method with the combination of a color-feed mechanism. Through careful mask design, nano-slits with various aspect ratios and sizes were obtained at wafer scale. The minimum feature size of the obtained nano-slits was 5 nm, which holds great potential in bio-molecule analysis such as DNA and protein detection and analysis.
关键词： uniformity,v-shaped nano-slit arrays,wet anisotropic etching,feature size
更新于2025-09-23 15:22:29
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Resonant inelastic x-ray incarnation of Young’s double-slit experiment
摘要： Young’s archetypal double-slit experiment forms the basis for modern diffraction techniques: The elastic scattering of waves yields an interference pattern that captures the real-space structure. Here, we report on an inelastic incarnation of Young’s experiment and demonstrate that resonant inelastic x-ray scattering (RIXS) measures interference patterns, which reveal the symmetry and character of electronic excited states in the same way as elastic scattering does for the ground state. A prototypical example is provided by the quasi-molecular electronic structure of insulating Ba3CeIr2O9 with structural Ir dimers and strong spin-orbit coupling. The double “slits” in this resonant experiment are the highly localized core levels of the two Ir atoms within a dimer. The clear double-slit-type sinusoidal interference patterns that we observe allow us to characterize the electronic excitations, demonstrating the power of RIXS interferometry to unravel the electronic structure of solids containing, e.g., dimers, trimers, ladders, or other superstructures.
关键词： Resonant inelastic x-ray scattering,quasi-molecular orbitals,electronic excitations,Young's double-slit experiment,spin-orbit coupling,interference patterns
更新于2025-09-23 15:22:29
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[IEEE 2018 International Conference on Electromagnetics in Advanced Applications (ICEAA) - Cartagena des Indias, Colombia (2018.9.10-2018.9.14)] 2018 International Conference on Electromagnetics in Advanced Applications (ICEAA) - EM Wave Scattering by a Window on a Wall
摘要： Electromagnetic wave scattering by a window on a building wall has been analyzed here as plane wave scattering by a dielectric slab in a thick conducting screen. High frequency asymptotic ray method is utilized for this analysis. Geometrical Theory of Diffraction has been used to obtain the diffracted fields by the edges of the aperture, then ray-mode conversion technique has been applied to get the modal field inside the slit region in order to consider the modal coupling and the re-radiation field. The validity of our formulation has been first tested by comparing the results with those obtained by the Kobayashi Potential method for the relatively narrow slit aperture cases. Then the various numerical calculation results have been made to show the effects of the wall and window thickness, and window’s glasses for practical wireless mobile communication frequencies.
关键词： ray-mode conversion,GTD,EM scattering,thick slit,window
更新于2025-09-23 15:21:21
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Slit beam shaping technique for femtosecond laser inscription of enhanced plane-by-plane FBGs
摘要： In this work, the development of plane-by-plane (Pl-b-Pl) fiber Bragg gratings (FBGs) by using a single pulse is reported. A slit oriented along the longitudinal axis of the fiber is employed for this. The purpose is to shape the beam so that the focal volume is spatially wider in the transverse direction of the fiber. In this way, it is possible to make 2-D modifications of the refractive index whose width and height depends on the slit width and the pulse energy, respectively. Through an analytical mathematical modelling, the relationship between the diameter of the Gaussian laser beam (Dx) and the slit width (s = Dy) is determined in order to obtain a circular cross-section. In the experimental results carried out, it can be observed that Dx/Dy=3 ratio cause positive and uniform refractive index changes, compared to the negative and inhomogeneous refractive index changes corresponding to point-by-point (PbP) FBGs. Likewise, Pl-b-Pl FBGs, presenting a broader modification of the core cross-section, show significantly lower losses in transmission (0.3 dB), as well as better reflectivity and FWHM. It is observed that these three parameters (losses, reflectivity and FWHM) have a monotonous tendency according to the slit width. Polarization-dependence is also evaluated.
关键词： Optical Fiber Sensor,Slit beam technique,Femtosecond laser,Plane-by-Plane,Fiber Bragg grating
更新于2025-09-23 15:21:01
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Effect of Surface Plasmon Resonance on the Anomalous Result of Young’s Double-Slit Experiment with a Metal Screen
摘要： An abnormal result of Young’s classic experiment with two slits in a metal screen is discussed, in which the appearance of a light spot behind a screen located centrally between the images of the slits is unusual. It is shown that the anomaly is caused by plasmon resonance in the metal–dielectric structure. The intensity of the diffraction pattern is calculated. Under resonance conditions, it overcomes the diffraction limit.
关键词： Young’s double-slit experiment,metal screen,diffraction limit,plasmon resonance
更新于2025-09-23 15:21:01
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The Interference Pattern of Plasmonic and Photonic Modes Manipulated by Slit Width
摘要： We demonstrate that the interference pattern of the plasmonic and photonic modes can be controlled by changing the slit width of a square slit structure. Based on the analyses of the plasmonic and photonic modes of slits with different widths, we theoretically derived the expressions of wavefield generated by a square slit. A far-field scattered imaging system is utilized to collect the intensity distribution experimentally. Various interference patterns, including stripes, square-like lattice array, and diamond-like lattice array, have been observed by adjusting the slit widths. In addition, the results were validated by performing finite-difference time-domain simulations, which are consistent with the theoretical and experimental results.
关键词： polarization,interference pattern,surface plasmon,slit width
更新于2025-09-23 15:19:57
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Spherical Particle Formation Mechanism in Pulsed Laser Melting in Liquid under Controlled-Pulse-Number Irradiation Using a Slit Nozzle Flow System
摘要： A detailed mechanism of pulsed laser melting in liquid (PLML) has remained in a controversial issue because of the difficulty associated with tracking and observing particles irradiated with a specific number of pulses in conventional batch-style irradiation. In a previous study, we developed a flow irradiation technique with a new slit nozzle for PLML mass-production. The slit nozzle can precisely control pulse numbers irradiated onto particles flowing through the slit nozzle. In the present study, this unique feature of the slit nozzle was used to clarify the PLML mechanism by a specific pulse number irradiation. According to a numerical analysis of the flow with the slit nozzle, 79% of the particles flowing through the slit nozzle were irradiated with two or three pulses and other particles that were irradiated with three or more pulses upon one passage through the slit nozzle at a 1.1 mL s?1 volume flow rate for a particle suspension in 60 wt% glycerol aqueous solution. Submicrometer-sized hollow spherical particles were formed via few-pulse irradiation of aggregates. After hollow particles were formed, the void in the hollow particles disappeared with increasing laser pulse number. Thus, an initial process of spherical particle formation and morphological transition of the particles with a specific irradiated pulse number were observed for the first time using the slit nozzle. The reduction of Fe3O4 particles via laser pulse irradiation was also tracked as a function of flow passage.
关键词： spherical particle formation,PLML,Fe3O4 reduction,pulsed laser melting in liquid,slit nozzle,hollow spherical particles
更新于2025-09-12 10:27:22