- 标题
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- 实验方案
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Functionalizing Window Coatings with Luminescence Centers by Combinatorial Sputtering of Scatter-Free Amorphous SiAlON:Eu2+ Thin Film Composition Libraries
摘要： SiAlON window coatings are applied on an industrial scale to achieve e.g. scratch-resistance and anti-reflection. Doping these SiAlONs with rare-earths adds luminescent functionality, which could be applied in photovoltaics. By using a combinatorial reactive sputtering approach, an amorphous thin film composition library with a Si:Al ratio from 0:062 : 1 to 3:375 : 1 and a Eu doping from 4:8 at:% to 26 at:% is created. This library uniquely combines high absorption, strong emission and absence of light scattering. By combining position-dependent EDX measurements with transmission and emission spectra, properties like the index of refraction, absorption strength, emission wavelength and decay times of the library can directly be related to the composition. Throughout the library, an index of refraction of 1:63 ± 0:03 is observed, typical for a film with low nitrogen content. The library also shows a large absorption coefficient of 1294 ± 8 cm?1 at:%?1. Laser-excited emission spectra show that the library has a strong redshift from 500 nm to 550 nm with increasing Al concentration. An increase in Eu concentration also causes a shift of the emission to red. Decay spectra show that a high degree of Si greatly improves the luminescence intensity. These functionalized SiAlON coatings can be of great interest for transparent and scatter-free luminescent solar concentrators applied as windows.
关键词： Combinatorial Science,SiAlON,Sputter Deposition,Solar-Conversion
更新于2025-11-14 15:30:11
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Physical properties of RF magnetron sputtered GaN/n-Si thin film: impacts of RF power
摘要： GaN thin film was successfully produced on n-Si(100) substrate by RF magnetron sputter under different RF power. Experimental measurement techniques such as UV/Vis spectroscopy, field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), atomic force microscopy (AFM), and Micro-Raman Spectroscopy were used to research effects of Radio Frequency power on physical properties of produced thin film. It has been found that produced thin film was polycrystalline structure with (100) and (110) planes of hexagonal GaN from X-ray diffraction measurement result. It also proved that increasing RF power gives rise to deterioration in crystal quality of GaN thin film. Reason of this deterioration was discussed. It has been achieved that increasing RF power has resulted in decreasing optical band gap energy of GaN thin film. Reasons for these changes in optical band gap energy were explained. It was seen that some thin films were grown as layer-plus-island mode (Stranski–Krastanov growth mode) and others were grown as layer-by-layer growth mode (Frank van der Merwe mode) from AFM analysis. It has been found that increasing RF power has resulted in improvement of surface morphology of thin film from field emission scanning electron microscopy analysis. However, reaching RF power to 125 W leads to start to deteriorate of surface of GaN thin film. The reasons for this have been discussed. E1(TO) transverse optical phonon mode of hexagonal GaN with different intensity was detected from Micro-Raman Spectroscopy measurement. The reasons for this difference have been discussed. It was concluded that RF power has played a significant role in growing high quality GaN thin film. Morphological, structural, and optical properties of GaN thin film were enhanced by controlling RF power, making them a potential candidate for LED, solar cell, diode application.
关键词： Thin film,III-nitride,RF magnetron sputter,Semiconductor,GaN
更新于2025-11-14 15:25:21
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Optimised Performance of Non-Dispersive Infrared Gas Sensors Using Multilayer Thin Film Bandpass Filters
摘要： In this work, performance improvements are described for a low-power consumption non-dispersive infrared (NDIR) methane (CH4) gas sensor using customised optical thin film bandpass filters (BPFs) centered at 3300 nm. BPFs shape the spectral characteristics of the combined mid-infrared III–V based light emitting diode (LED)/photodiode (PD) light source/detector optopair, enhancing the NDIR CH4 sensor performance. The BPFs, deposited using a novel microwave plasma-assisted pulsed DC sputter deposition process, provide room temperature deposition directly onto the temperature-sensitive PD heterostructure. BPFs comprise germanium (Ge) and niobium pentoxide (Nb2O5) alternating high and low refractive index layers, respectively. Two different optical filter designs are progressed with BPF bandwidths (BWs) of 160 and 300 nm. A comparison of the modelled and measured NDIR sensor performance is described, highlighting the maximised signal-to-noise ratio (SNR) and the minimised cross-talk performance benefits. The BPF spectral stability for various environmental temperature and humidity conditions is demonstrated.
关键词： III–V,sensor,methane,thin film,MBE,NDIR,microwave,bandpass,sputter,heterostructure,infrared
更新于2025-09-23 15:23:52
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22.2: <i>Invited Paper:</i> Sputtered Molybdenum-Oxide for Anti-Reflection Layers in Displays: Optical Properties and Thermal Stability
摘要： Molybdenum (Mo) is commonly used for thin film transistor (TFT) metallization in displays. Apart from its outstanding electronic and adhesive properties in the metallic form, it also possesses stable oxidation states, including sub-stoichiometric oxides. Depending on the amount of oxygen, the properties can be widely tuned and oxygen-deficient MoO3-y films can be electrical conducting and optically absorbing, making them suitable candidates for integration as low-reflection coatings for on/in cell touch, black matrix on array, narrow bezel, or TFT metallization. Deposition of these oxides by fully reactive sputtering from metal targets implies several problems such as lateral inhomogeneities on large substrates (>G5) and difficult control of oxygen flow. To avoid these obstacles, DC-sputtering from ceramic Molybdenum oxide targets without the addition of oxygen gas is proposed. In our work, we show the non-reactive DC-sputtering of MoOx:TaOx in a stable and reliable process with deposition rates of up to 180 nm/min. Further on, the electrical, optical, and structural properties of the resulting films are studied. The reflectance of light from external sources and the resulting color impression of the dark layer coatings is investigated on different substrates. The color coordinates of the film can be tuned by the layer thickness, the type of covered metal layer (e.g. Cu, Al, Mo), as well as composition of the oxide. From a process stability point of view, we discuss changes during additional annealing steps, and show structural changes at elevated temperatures.
关键词： Ceramic Target,Molybdenum,Sputter Deposition,Low Reflectance,Narrow Bezel,Oxide
更新于2025-09-23 15:23:52
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Bipolar Resistive Switching Effect in BiFeO3/Nb:SrTiO3 Heterostructure by RF Sputtering at Room Temperature
摘要： The (001) oriented BiFeO3 thin film was deposited on the Nb: SrTiO3 substrate by radio frequency magnetron sputtering technology, and the bipolar resistive switching effect was observed in the BiFeO3/Nb: SrTiO3 heterostructure. The results showed that the ratio between the high resistance and low resistance was more than two orders at a reading pulse of -0.5 V and it exhibited excellent retention over 3600 s. The current density-voltage characteristic was dominated by the space-charge-limited conduction. The resistive switching effect of the structure was attributed to the trapping/detrapping of the charge carriers.
关键词： space-charge-limited conduction,bipolar resistive switching,BiFeO3 films,sputter
更新于2025-09-23 15:22:29
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[IEEE NAECON 2018 - IEEE National Aerospace and Electronics Conference - Dayton, OH, USA (2018.7.23-2018.7.26)] NAECON 2018 - IEEE National Aerospace and Electronics Conference - Ultrasensitive label-free tobramycin detection with aptamer-functionalized ZnO TFT biosensor
摘要： Aminoglycoside antibiotic such as tobramycin is critical to the treatment of Gram-negative bacterial diseases such as Cystic Fibrosis (Pseudomonas aeruginosa) and other respiratory problems routinely seen in military personnel. Bottom gate (BG) zinc oxide (ZnO) ultra-thin film transistors (TFTs) were fabricated and functionalized with thiol-anchored aptamers as sensitive tobramycin biosensors and a Lower Detection Limit (LDL) of 0.1 nM was extracted from the adsorption coverage isotherm. Sputter deposition of ZnO allows the control of film thickness, stoichiometry, defects and interface states. Intrinsically high surface morphology of ZnO allows improved aptamer functionalization and sensitivity of detection.
关键词： tobramycin,functionalization,biosensor,sputter deposition,aptamer,cystic fibrosis,thin film transistor,ZnO
更新于2025-09-23 15:22:29
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In Situ Study of Sputtering Nanometer-Thick Gold Films onto 100 Nanometer-Thick Spiro-OMeTAD Films: Implications for Perovskite Solar Cells
摘要： The performance of many perovskite solar cells is closely related to the spiro-OMeTAD/gold interface since gold is used as top contacts, which renders the detailed understanding of the interface formation very important. In this work, sputter deposition as an industry-relevant, high-rate, large-scale and well-controllable deposition technique is used to prepare gold electrodes on top of a 100 nm thick spiro-OMeTAD film. In situ grazing incidence small angle X-ray scattering (GISAXS) is used to study the nanostructure-growth kinetics of the gold contact on top of the spiro-OMeTAD film during the sputter process. The results show that the gold grows in nanoscale clusters, which then coalesce into a complete yet still nanogranular layer forming the top contact with a thickness of 90 nm. Based on simulations of the 2D GISAXS patterns additional information about the shape of the nanosized gold cluster is gained at the different cluster growth stages. Furthermore, the diffusion of gold into the spiro-OMeTAD film occurs during the sputter process as verified with X-ray reflectivity. In a depth of 3.5 nm below the gold contact the gold doping level of the spiro-OMeTAD film is 6.3 % irrespective of the final gold contact thickness. Thus, the interface between the spiro-OMeTAD film and the Au contact is not sharp as commonly sketched as well as the contact is grainy, which will be both of importance for the performance of device such as perovskite solar cells.
关键词： gold contacts,spiro-OMeTAD film,sputter deposition,in situ GISAXS,growth kinetics
更新于2025-09-23 15:21:01
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Evaluation of ion bombardment in DC magnetron sputtering DC
摘要： Momentum of ion bombardment in sputtering deposition process, which strongly depends on internal stress of thin film, has been evaluated regarding to a new parameter Pi we previously proposed for fine-tuning of mechanical, optical, electrical and magnetic properties. In this study, we demonstrate to estimate the Pi defined as (i/a) p, where i the ion flux, a the atom flux and p the ion’s momentum, by means of Langmuir probe and multi-grid analyzer in a function of negative bias voltage applied on substrates Vsub. As a result, it was found that the Pi was roughly proportional to Vsub except on lower voltage than 30 V. This indicates that the Pi should be measured plasma-diagnostically under incident ion energy as low as plasma potential.
关键词： Sputter,Thin film,Ion bombardment,Intrinsic stress,Plasma
更新于2025-09-23 15:21:01
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Thermochromic Oxide-Based Thin Films and Nanoparticle Composites for Energy-Efficient Glazings
摘要： Today’s advances in materials science and technology can lead to better buildings with improved energy efficiency and indoor conditions. Particular attention should be directed towards windows and glass facades—jointly known as “glazings”—since current practices often lead to huge energy expenditures related to excessive inflow or outflow of energy which need to be balanced by energy-intensive cooling or heating. This review article outlines recent progress in thermochromics, i.e., it deals with materials whose optical properties are strongly dependent on temperature. In particular, we discuss oxide-based thin surface coatings (thin films) and nanoparticle composites which can be deposited onto glass and are able to regulate the throughput of solar energy while the luminous (visible) properties remain more or less unaltered. Another implementation embodies lamination materials incorporating thermochromic (TC) nanoparticles. The thin films and nanocomposites are based on vanadium dioxide (VO2), which is able to change its properties within a narrow temperature range in the vicinity of room temperature and either reflects or absorbs infrared light at elevated temperatures, whereas the reflectance or absorptance is much smaller at lower temperatures. The review outlines the state of the art for these thin films and nanocomposites with particular attention to recent developments that have taken place in laboratories worldwide. Specifically, we first set the scene by discussing environmental challenges and their relationship with TC glazings. Then enters VO2 and we present its key properties in thin-film form and as nanoparticles. The next part of the article gives perspectives on the manufacturing of these films and particles. We point out that the properties of pure VO2 may not be fully adequate for buildings and we elaborate how additives, antireflection layers, nanostructuring and protective over-coatings can be employed to yield improved performance and durability that make TC glazings of considerable interest for building-related applications. Finally, we briefly describe recent developments towards TC light scattering and draw some final conclusions.
关键词： thermochromism,vanadium dioxide,thin film,energy-efficient glazing,coating,sputter deposition,nanoparticle
更新于2025-09-23 15:21:01
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Mesoporous black TiO2 array employing sputtered Au cocatalyst exhibiting efficient charge separation and high H2 evolution activity
摘要： The separation and transfer of photogenerated carriers are the key issue in the design of high performance TiO2 photocatalysts. In order to overcome the kinetic limitations and achieve rapid charge transfer, TiO2-related multi-component catalysts have been extensively studied. Among all the TiO2 supports, the impressive black TiO2 (BT) with broad visible light absorption spectrum and oxygen vacancies are preferable, but still suffers from low quantum efficiency. Meanwhile, poor control of cocatalyst placement by conventional loading method can also severely impede photocatalytic efficiency. Herein a fast and simple metal magnetron sputter approach was used to place highly-uniformed Au nanoparticles cocatalyst on the top of the mesoporous TiO2-BT nanotube array fabricated by in situ electrochemical anodization approach on a Ti film. This confined plasmonic photocatalyst with highly uniformly distributed Au cocatalysts exhibited greatly enhanced charge-separation and charge-transfer behavior, and a remarkable 10 times enhancement of the photocatalytic H2 evolution reactivity over conventional TiO2 nanotube. The TiO2-BT-Au electron transfer cascade structure is proposed in which black TiO2 acts as a buffer layer for TiO2 conduction band electrons, allowing efficient photogenerated electrons to be transferred to Au nanoparticles and then into the TiO2 pores that suitable for H2 generation. Since the nanotube walls themselves are curved upwards, the short diffusion length allows electrons to be easily transferred to the cocatalyst, where recombination of photogenerated electron pairs is limited. The metal magnetron sputter technique for noble metal cocatalyst immobilization and the unique TiO2-BT-Au electron-transfer system are promising and can be extended to the design of other supported catalysts.
关键词： Metal magnetron sputter,TiO2 nanotube arrays,Oxygen vacancies,Hydrogen evolution,Au nanoparticle,Black TiO2
更新于2025-09-23 15:21:01