Investigations on the laser cutting of LiNbO3

摘要： In this work, we study the precision cutting technology of LiNbO3 which is belonged to brittle materials and difficult to machine. By using a femtosecond laser, we explore the influence of wavelengths on the cutting quality, the surface and cross-section morphology of the specimens were examined by optical microscopy and have been measured. Subsequently, two optimization processing solutions have been designed to cut LiNbO3 with high quality and high reproducibility, the thermal effect and chipping have been reduced obviously. At last, the complete cut through the plate of LiNbO3 has been achieved.