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An Optical MEMS Acoustic Sensor Based on Grating Interferometer
摘要： Acoustic detection is of great signi?cance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 μm deep cavity and 2.4 μm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to ?15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 ?C to 55 ?C.
关键词： interferometry,stability,acoustic sensors,MEMS,grating
更新于2025-11-28 14:23:57
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[IEEE 2018 20th International Conference on Transparent Optical Networks (ICTON) - Bucharest (2018.7.1-2018.7.5)] 2018 20th International Conference on Transparent Optical Networks (ICTON) - Transforming the Fiber-Optic Network into a Dense and Ultrasensitive Seismic Sensor Array
摘要： We show a technology capable of performing position-resolved measurement of nanostrain perturbations along a conventional optical fiber cable, with meter-scale resolution. This technology can be deployed in already existing networks to achieve a dense and ultrasensitive seismic sensor array. Applications ranging from seismic protection to chemical sensing are explored.
关键词： seismology,distributed fiber optics sensors,Rayleigh scattering,optical time domain reflectometry,distributed acoustic sensors
更新于2025-09-23 15:22:29
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[IEEE 2019 2nd International Colloquium on Smart Grid Metrology (SMAGRIMET) - Split, Croatia (2019.4.9-2019.4.12)] 2019 2nd International Colloquium on Smart Grid Metrology (SMAGRIMET) - Fiber Optic Sensor Cable Based on Hollow Capillary Tube with Three Tightly Encapsulated Optical Fibers
摘要： Fiber optic sensor cable technology is relatively new field that combines a set of scientific and technical disciplines in a special way in order to meet industrial standards. In this paper we discuss one particular design for multipurpose and configuration multivalent optical fiber sensing. It has the potential to integrate more detection and measurement techniques in one cable body and this, in turn, largely contributes to installation cost optimization and directly impacts investment plans and industrial success. The article presents also a unique high-pressure high temperature lab facility conceptualized and constructed for testing and evaluation of this and similar optical fiber sensor cables.
关键词： fiber optic measurements,OFDR,acoustic sensors,BOTDA,BOTDR,DAS,Brillouin effect,optical fiber,pressure sensors,fully distributed optical fiber sensor,monitoring systems,strain sensors,temperature sensors,OTDR
更新于2025-09-16 10:30:52