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Surface ablation efficiency and quality of fs lasers in single-pulse mode, fs lasers in burst mode, and ns lasers
摘要： In recent years, the burst-mode caught a lot of attention in the field of ultrashort-pulse laser micro machining. One of the major issues is the influence of the burst pulse number and frequency on ablation efficiency and quality. A recent publication reported of a significant increase in ablation efficiency when processing with ≥ 25 burst pulses at ≥ 100 MHz burst frequencies. This raises the question of whether processing with such high pulse densities can be attributed to non-thermal ablation, or whether a quasi-nanosecond laser ablation behavior is achieved. To answer this question, we determined ablation efficiencies as function of fluence for silicon, stainless steel, and copper and compared the ablation quality at the optimal fluence using the following laser systems: femtosecond laser operated in single-pulse mode, fs laser operated in 28-pulse-burst mode with a burst pulse frequency of 148 MHz, and a nanosecond laser with a pulse duration of 175 ns, which is identical with the temporal length of the burst pulse train. The comparison showed that the burst mode used produces similar surface morphologies and melt burrs as the nanosecond laser, but at about 2/3 of its efficiency.
关键词： burst mode,ablation efficiency,silicon,laser ablation,copper,steel
更新于2025-09-12 10:27:22
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Heat accumulation effects in laser processing of diamond-like nanocomposite films with bursts of femtosecond pulses
摘要： In this paper, we have investigated the burst mode (BM) ablation and surface structuring of diamondlike nanocomposite (DLN) a-C:H:Si:O films with femtosecond laser pulses (wavelength λ = 515 nm, pulse duration τ = 320 fs, and pulse repetition rate f = 100 kHz) under different scanning conditions (single spots and linear structures). The pulse separation in the bursts is 25 ns (intraburst frequency f = 40 MHz), and the pulse number is varied from 1 to 8. The ablation depth and specific ablation rates (μm3/μJ) are found to be higher for the burst mode compared to single-pulse irradiation, increasing with the pulse number in the burst. The obtained experimental data of the higher ablation efficiency are shown to correlate with computer simulations of the BM ablation. In correlation with the ablation findings, Raman spectra of single spots and microgrooves have evidenced a growing graphitization of the amorphous film structure with the pulse number in the bursts (at an equal energy deposited into the films). Contact-mode atomic force microscopy (AFM) is applied to reveal an influence of the BM processing on the surface properties (nanoscale relief, friction) of laser-structured films. Based on the ablation and Raman data analysis, AFM examination of ablated/redeposited layers, and computer simulations of the burst mode ablation, the heat accumulation is identified as the main factor responsible for the enhanced ablation efficiency during the BM processing of DLN films. In addition, results of the high precision surface microstructuring of DLN films in the burst mode are presented.
关键词： heat accumulation,diamondlike nanocomposite films,surface structuring,femtosecond laser pulses,burst mode ablation
更新于2025-09-12 10:27:22