[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT

摘要： This paper presents a piezoelectric micromachined ultrasonic transducer (pMUT) array fabricated using high-piezoelectric-coefficient ceramic PZT wafers. A new process for polishing ceramic PZT layers down to 5 μm has been developed and applied for manufacturing high-sensitivity pMUTs. A 2 MHz working pMUT array (8×8 elements) based on ceramic PZT has been designed, modeled, fabricated and characterized.