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[Micro/Nano Technologies] Micro and Nano Fabrication Technology Volume 1 || Fabrication of Metallic Nanodot Arrays
摘要： Metal nanodot arrays exhibit unique optical characteristics, and they are expected to find widespread applications in biosensors and various optical devices. In this section, simple and efficient manufacturing processes are introduced for metal nanodot arrays. These processes are based on the combination of thin metal film coatings deposited on substrates and thermal dewetting. The first process discussed herein is a conventional thermal dewetting method. With this method, it is shown that the average dot diameter can be controlled based on the chosen process conditions. The second process is based on the use of grid patterning on coated metal films. This process can allow fabrication of nanodot arrays with uniform dot diameters and achieve highly ordered alignment of dots. The third process generates a metal nanodot array based on a self-organization manner on a nanogrid-patterned substrate. It constitutes a high-productivity process based on the transfer of the metal nanodot array to an adhesive film. The basic mechanisms underlying these processes are discussed herein.
关键词： Productivity,Metal coating,Dot transfer,Surface energy,Metal nanoparticles,Agglomeration,Nano plastic forming,Optical characteristics,Grid patterning,Self-organization,Biosensors,Thermal dewetting
更新于2025-09-10 09:29:36
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Dewetting mechanisms and their exploitation for the large-scale fabrication of advanced nanophotonic systems
摘要： Recent progress in submicron- and nano-fabrication technologies has led to the emergence of novel photonic structures such as optical nanoantennas and metasurfaces. Real-life applications of these advanced photonic structures still require substantial improvement of the fabrication processes, in terms of their throughput and cost-effectiveness. Because of its simplicity and effectiveness, dewetting of a thin film has attained increasing attention as a feasible process for improving the scalability and productivity. Here, we provide an overview of the mechanisms and phenomenologies of dewetting to foster an improved fundamental understanding necessary for the optimisation of the dewetting process condition and template design. We then review the strategies demonstrating the use of templated-dewetting for producing well-aligned arrays of submicron- and nanostructures with great control over their size, shape and arrangement. Recent applications of dewetted structures in advanced nanophotonics are reviewed with an emphasis on the exploitation of dewetting mechanisms. Special attention is given to the fabrication of resonant optical nanoantennas and nanophotonic applications in which high repeatability and throughput are important parameters: sensing, colourisation, photovoltaics and nonlinear light frequency conversion. We expect this review to provide a basis for the use of thin-film dewetting to realise the industrial-level fabrication of various practical advanced photonic systems.
关键词： optical nanoantenna,interfacial instability,plasmonics,all-dielectric nanophotonics,nanofabrication,advanced photonic applications,Dewetting,thin film
更新于2025-09-04 15:30:14