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Fracture strength of silicon torsional mirror resonators fully coated with submicrometer-thick PECVD DLC film
摘要： In this work, we attempted to enhance the torsional fracture strength of single crystal silicon (SCS) resonators for micro mirrors application by introducing a 300 nm-thick diamond-like carbon (DLC) coating. The SCS torsional beams of the resonators were 20 μm wide and 9 μm thick, and fully coated with DLC films using plasma enhanced chemical vapor deposition (PECVD) at three different deposition bias voltages. The resonators were driven by a piezoelectric actuator and their angular amplitude was measured by a custom-made torsional test system. Average nominal torsional fracture strength of DLC coated resonators was 11.1–30.0% higher than that of bare SCS, reaching a value of 2.93 GPa. The torsional fracture strength of resonators exhibited a good agreement with the tensile fracture strength. Deviations in torsional strength were reduced with increasing deposition bias voltage due to the compressive residual stress of DLC films.
关键词： Single crystal silicon,Micro mirror resonator,Diamond-like carbon film,Strength deviation,Torsional fracture strength
更新于2025-09-23 15:23:52
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Ellipsometry - Principles and Techniques for Materials Characterization || Spectroscopic Ellipsometry - Application on the Classification of Diamond-Like Carbon Films
摘要： Diamond-like carbon (DLC) films have been spreading from their theoretical basis to worldwide industrial applications because of their unique properties. Since their properties depend strongly on the conditions of synthesis, the effective classification of DLC films becomes quite necessary. From the ternary phase diagram to the Japan New Diamond Forum standard, the classification attempts are also accompanied by the continuous development of their applications. Generally, the hydrogen content and sp3/(sp2 + sp3) ratio are the primary parameters for their classification. However, researchers are afraid that currently sp3/(sp2 + sp3) ratio estimated included not only network sp3 but also sp3 hybrid carbons in the hydrogen-terminated cluster. Simultaneously, the above classification methods need to use the large equipment, such as the synchronous radiation source. Therefore, to realize more straightforward to classify DLC films efficiently, the optical constants (refractive index (n) and extinction coefficient (k)) have been proposed in 2013 to be effective method to classify the DLC films, for which a lot of considerable discussion in the past ISO/TC-107 meetings has been made. The purpose of this chapter is to introduce the latest developments of optical constants on the classification of DLC films and explore their relationship with the current standard.
关键词： spectroscopic ellipsometry,diamond-like carbon film,classification
更新于2025-09-23 15:21:01