Structured-illumination Makyoh-topography: optimum grid position and its constraints

摘要： Complementing conventional Makyoh topography with structured illumination using a sparse square grid, the large-scale surface shape can be calculated with a deflectometry approach, while the sample’s morphology can still be imaged. However, the grid’s image must be sharp not to mask the Makyoh image of the sample morphology. In this paper, the instrumental conditions for the grid sharpness are established. The two main types of Makyoh set-ups (lens and mirror based) are analysed. It is shown that the lens-based set-ups allow the position of the grid to be sharp on the Makyoh image. However, for mirror-based set-ups this is not possible because of geometrical instrumental constraints. The calculations are corroborated with experiments.