Acoustic emission-based characterization of focal position during ultra-short pulse laser ablation

摘要： Microstructures were ablated using an ultra-short pulse laser system in order to investigate the influence of focal position on the surface topography. In addition, acoustic emissions measured by a piezoelectric sensor adapted to the AISI 4140 workpiece were analyzed and correlated with the focal position and the resulting surface topography. Frequency ranges sensitive to variations of the z-axis position were determined by STFT analysis. Subsequently, significant signal components were processed to enable an inference about the focal position. The hypothesis of assessing the focal position in-process based on acoustic emissions to ensure high precision during laser ablation could be confirmed.