[IEEE 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) - Paris, France (2019.9.1-2019.9.6)] 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) - Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures

摘要： We fabricate terahertz anti-reflection structures on the surface of high-resistivity silicon via femtosecond laser processing. We measure its spectral properties by terahertz time-domain spectroscopy, and find a broadband increase in transmissivity over 0.3 - 2.5 THz. We investigate the observed spectral characteristics of this transmission by using numerical simulation. We successfully reproduce the observed result for all frequencies, including a previously undocumented high-frequency drop-off, when the model includes additional material losses. We believe these effects to be induced by the laser-ablation fabrication process.