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A Low Frequency Vibration Energy Harvester Using ZnO Nanowires on Elastic Interdigitated Electrodes
摘要： This paper presents a low frequency piezoelectric vibration energy harvester using ZnO nanowires on elastic interdigitated electrodes. The interdigitated electrodes are formed using electroplated Ni and have suspended parts at the edges that are elastic and deformable by applying external force. A spherical Ni ball is used as a proof mass, which transforms a low frequency mechanical vibration into the force applied to deform the elastic electrodes. The ZnO nanowires are grown selectively on the electrodes and can generate a piezoelectric potential when the elastic electrodes are deformed by the proof mass activated by the external mechanical vibration. The proposed operation concept is demonstrated using two different types of energy harvesters, which have simple suspended part and cantilever array structures added to the electrodes, respectively. The output voltage of the fabricated harvesters is measured using a vibration exciter at 6 Hz sinusoidal vibration with an acceleration of 0.5 g. Maximum output power of 12.8 pW and 18.8 pW was generated with a load resistance of 1 MΩ for the harvesters using the simple suspended structure and cantilever array, respectively.
关键词： Spherical Proof Mass,Elastic Interdigitated Electrodes,ZnO Nanowires,Low Frequency Piezoelectric Vibration Energy Harvester
更新于2025-09-23 15:23:52
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An optimized Graphene/4H-SiC/Graphene MSM UV-photodetector operating in a wide range of temperature
摘要： In this paper, .an accurate analytical model has been developed to optimize the performance of an Interdigitated Graphene Electrode/p-silicon carbide (IGE/p-4H-SiC) Metal semiconductor fitness function for the multi objective optimization (MOGA) approach. The optimized sensitivity and speed performances was executed. Our results confirm the excellent ability of the suggested Graphene electrode system to decrease the unwanted shadowing effect. A responsivity of 238 μA/W was obtained under 325-nm illumination compared to the 16.7 μA/W for the conventional Cr-Pd/p-SiC PD. A photocurrent to- dark-current ratio (PDCR) of 5.75 × 105 at 300K and 270 at 500K was distinguished. The response time was found to be around 14 μs at 300K and 54.5 μs at 500K. Furthermore, the developed model serves as a fitness function to recognize the IGE formalism pattern which permits the enhancement of the performance of the proposed Gr/4H-SiC IE MSM PD using MOGA-based technique. The achieved results indicate that the suggested design methodology not only permits to realize a superior compromise amid responsivity and response time, but also shed light on the proposed device’s ruggedness under high temperature conditions. This opens the way to realize ultra-sensitive, high-speed SiC optoelectronic devices for extremely high temperature applications.
关键词： Analytical Model,UV photodetector,Graphene,MOGA approach,4H-SiC,interdigitated electrodes
更新于2025-09-23 15:19:57
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Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 ?μm Shadow Masks and sub-10 ?μm Interdigitated Electrodes (IDEs) Fabrication
摘要： Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromachining tool by determining the ablation characteristics of six (6) different materials and demonstrating two applications. Both the thermodynamic theoretical and experimental ablation characteristics of stainless steel (SS) and aluminum are examined at 1064 nm, silicon and polydimethylsiloxane (PDMS) at 532 nm, and Kapton? and polyethylene terephthalate at 355 nm. We found that the experimental data aligned well with the theoretical analysis. Additionally, two applications of this multimodal laser micromachining technology are demonstrated: shadow masking down to approximately 1.5 μm feature sizes and interdigitated electrode (IDE) fabrication down to 7 μm electrode gap width.
关键词： interdigitated electrodes,ablation characteristics,multimodal laser micromachining,shadow mask
更新于2025-09-19 17:13:59