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Optimization of Measuring Parameters for Two-dimensional Elemental Mapping in Laser-induced Breakdown Optical Emission Spectrometry Using 1-kHz Q-switched Nd:YAG Laser
摘要: This paper described how the lateral resolution of an elemental mapping was estimated in laser-induced breakdown optical emission spectrometry (LIBS), when the focus point of a high-frequency Q-switched Nd:YAG laser was moved on a sample surface, along with measuring the emission signal from the resultant plasma. Several measuring parameters were optimized to improve the lateral resolution; namely, they were an averaged laser power of 1 mJ/pulse, a laser repetition frequency of 1 kHz, a scanning rate of the laser beam of 0.5 mm/s, and an atmospheric gas pressure of He 1 000 Pa. Using these optimal parameters, a lateral resolution was obtained to be ca. 20 μm in the one-dimensional direction of laser scan. Furthermore, two model samples, in which regularly-aligned copper circles were deposited on a nickel plate, were irradiated by a scanning laser beam to determine actual resolving abilities both in a line direction along travelling the laser and in a two-dimensional direction over a certain sample area. The sample having an interval of 85 μm between the copper circles could give an emission image which was appropriately resolved in the two-dimensional as well as the one-dimensional direction; however, in the other sample having the 25-μm interval, the two-dimensional resolution became degraded compared to the resolution of the line scan, probably because the ablation grooves, which were left on the sample surface, had a width of more than 100 μm and were overlapped with each other in the observed area.
关键词: lateral resolution,copper,scanning laser beam,laser-induced breakdown plasma spectrometry,laser ablation
更新于2025-09-23 15:19:57
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Lateral resolution enhancement using programmable phase modulator in optical coherence tomography
摘要: Adaptive optics plays an important role in the correction of high-order aberrations to enhance lateral resolution. An OCT system coupled with a programmable phase modulator is designed to verify lateral resolution improvement. The Hamamatsu high-resolution, non-pixelized, optically addressed light modulator (PAL-SLM) PPM X7550 series is used to correct aberrations, utilizing a simple method based on phase information from OCT images. The advantages of this method are its high simplicity and low cost. A raster scanning technique is adopted to scan samples covered with scattering suspension. Metal lines covered with scattering suspension are imaged, and a respective correction is applied to remove the aberration. Results demonstrate an improvement in lateral resolution on metal grid samples.
关键词: lateral resolution,PAL-SLM,adaptive optics,aberration correction,OCT
更新于2025-09-11 14:15:04