Uniform and smooth molybdenum film produced through picosecond pulsed laser deposition

摘要： An approach to achieve uniform and smooth molybdenum (Mo) ?lm on a BK7 glass plate at room temperature is proposed through picosecond pulsed laser deposition, with the pulsed laser radiating the target along a linear track. A numerical model is established to analyze the in?uence of linear scanning offsets on the thickness homogeneity of the deposited thin ?lm. Through an appropriate choice of radiation intensity and scanning parameters, a uniform and smooth layer of Mo thin ?lm is prepared with its maximum thickness variation and root-mean-square roughness better than 5% and 1.2 nm, respectively.