Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 ?μm Shadow Masks and sub-10 ?μm Interdigitated Electrodes (IDEs) Fabrication

摘要： Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromachining tool by determining the ablation characteristics of six (6) different materials and demonstrating two applications. Both the thermodynamic theoretical and experimental ablation characteristics of stainless steel (SS) and aluminum are examined at 1064 nm, silicon and polydimethylsiloxane (PDMS) at 532 nm, and Kapton? and polyethylene terephthalate at 355 nm. We found that the experimental data aligned well with the theoretical analysis. Additionally, two applications of this multimodal laser micromachining technology are demonstrated: shadow masking down to approximately 1.5 μm feature sizes and interdigitated electrode (IDE) fabrication down to 7 μm electrode gap width.