[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - From Nanostructured Piezoelectric Materials to Broadband Transducers for High Resolution Ultrasonic Imaging

摘要： One-dimensional (1D) piezoelectric nanotubes have been fabricated and integrated for producing high frequency nanotube array ultrasonic transducers for high resolution ultrasonic imaging. We find that the nanotube structural feature and the unique nanoconfinement-induced crystal and polarization orientation lead to outstanding piezoelectric material properties and the resulting superior transducer performance. The nanotube array ultrasonic transducers show a broad bandwidth of 126 % (-6 dB) at 108 MHz, with significantly improved sensitivity in comparison with conventional thin film transducers despite the size shrinkage. We further demonstrate high resolution scanning ultrasonic imaging and photoacoustic imaging using the obtained nanotube array transducers, exhibiting great application values.