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In-situ phosphorus-doped polysilicon prepared using rapid-thermal anneal (RTA) and its application for polysilicon passivated-contact solar cells
摘要： A rapid thermal anneal (RTA) is used to crystallize the plasma-enhanced chemical vapor deposition (PECVD) deposited hydrogenated amorphous silicon (a-Si:H) thin film to form the phosphorus-doped polysilicon passivated contact in tunnel oxide passivated contact (TOPCon) solar cells. The effects of annealing temperature, annealing time, cooling time, and the polysilicon thickness on the surface passivation are investigated. The primary advantage of the RTA is reducing the whole crystallization period to ~15 min, shorter than the conventional tube-furnace annealing period of >60 min. We find that the RTA is a robust method to prepare high-quality polysilicon passivated contact without introducing blistering when the thickness of the a-Si:H is less than 40 nm. The optimized RTA process leads to an implied open-circuit voltage (iVoc) of 712 mV and a single-sided dark saturation current density (J0,s) of 12.5 fA/cm2 in the as-annealed state, which is inferior to the surface passivation of the controlled one prepared by a tube furnace annealing. Fortunately, a subsequent Al2O3 capping hydrogenation improves the iVoc and J0,s to 727 mV and 4.7 fA/cm2, respectively. The champion conversion efficiency of 23.04% (Voc ? 679.0 mV, Jsc ? 41.97 mA/cm2 and FF ? 80.86%) is achieved, which demonstrates the effectiveness of RTA for preparing a high-efficiency polysilicon passivated-contact solar cell.
关键词： Rapid thermal anneal (RTA),Polysilicon passivated contact,c-Si,Solar cell,PECVD,TOPCon
更新于2025-09-23 15:19:57
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Texture and phase variation of ALD PbTiO <sub/>3</sub> films crystallized by rapid thermal anneal
摘要： PbTiO3 (lead titanate) thin films were deposited by atomic layer deposition (ALD) and crystallized via rapid thermal anneal. The films were grown using lead bis(3-N,N-dimethyl-2-methyl-2-propanoxide) and tetrakis dimethylamino titanium as cation precursors. A combination of H2O and ozone was used as oxidizers. Phase-pure, stoichiometric PbTiO3 was confirmed using x-ray diffraction, Rutherford backscattering spectroscopy, and scanning transmission electron microscopy. Ferroelectric hysteresis loops obtained by patterning circular capacitors with areas of 4.92 × 10?4 cm2 indicate a Pmax = 48 μC/cm2, 2Pr = 60 μC/cm2, Ec1 = ?73 kV/cm, Ec2 = 125 kV/cm, and a leakage current density of 15 μA/cm2 at 138 kV/cm. Capacitance versus voltage measurements were used to obtain a maximum dielectric constant of 290 at 85 kV/cm and loss tangent under 4% tested in the range of ±275 kV/cm. ALD PbTiO3 grown with near-ideal cation ratios crystallized into randomly oriented perovskite grains when grown on a sputtered Pt-coated Si substrate. A variation of rapid thermal anneal temperatures, ramp rates, and nucleation layers was investigated and did not have a significant effect on perovskite grain orientation.
关键词： texture,ferroelectric,lead titanate,rapid thermal anneal,atomic layer deposition
更新于2025-09-19 17:15:36