Optical Characteristics of Zinc Oxide Films on Glass Substrates

摘要： An algorithm is developed for solving the inverse problem of multiangular spectrophotometry of a layer on a plane-parallel substrate of finite thickness using s- and p-polarized waves. It allows the dispersive properties of the layer and substrate to be studied both far from and in the vicinity of the resonant wavelengths. The dispersive properties of layers of pure and Al-doped ZnO on glass substrates are investigated using it. It is shown that doping shifts the absorption band maximum to shorter wavelength and decreases the refractive index of the material. The applicability limits of known approximate expressions for determining the spectral dependence of the absorption coefficient of a layer from spectrophotometric data are estimated.