- 标题
- 摘要
- 关键词
- 实验方案
- 产品
-
[IEEE 2018 International Conference on Optical MEMS and Nanophotonics (OMN) - Lausanne (2018.7.29-2018.8.2)] 2018 International Conference on Optical MEMS and Nanophotonics (OMN) - Selective Infiltration Damping of MEMS Scanning Mirrors
摘要： Quasi-static MEMS scanning mirrors are used for optical beam steering on arbitrary trajectories. They have to provide a broad mechanical bandwidth depending on the desired speed. In this work an approach by passive damping of the MEMS mirrors with gel droplets is described, that allows to increase the usable bandwidth. In order to achieve this, a dielectric gel is dispensed into the mirrors' structure. The appropriate infiltration method is presented. Static and dynamic properties such as maximum tilt angle and frequency response are investigated. Furthermore the reduction of parasitic effects like the coupling of the two axes of the mirror is discussed.
关键词： damping,frequency response,viscoelastic gel,scanning mirror,MEMS
更新于2025-09-23 15:21:01
-
[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - A Closed-Loop Controlled Cmos Mems Biaxial Scanning Mirror for Projection Display
摘要： This work presents a bi-axial electromagnetically-driven piezoresistively sensed scanning mirror with a θopt?D?fr,fast product over 2400 deg?mm?kHz, showing the capability to achieve HD720 (720 × 1280) display resolution. Both driving and sensing capabilities are conveniently realized by CMOS MEMS technologies. The transduction mechanism provides a more linear response than capacitively transduced scanning mirrors. Based on the open-loop characterization of the driving and sensing performance, closed-loop control of slow-axis motion is designed and demonstrated.
关键词： piezoresistive sensing,closed-loop control,scanning mirror,CMOS MEMS,electromagnetic actuation,projection display
更新于2025-09-12 10:27:22
-
Recent Progress on Photoacoustic Imaging Enhanced with Microelectromechanical Systems (MEMS) Technologies
摘要： Photoacoustic imaging (PAI) is a new biomedical imaging technology currently in the spotlight providing a hybrid contrast mechanism and excellent spatial resolution in the biological tissues. It has been extensively studied for preclinical and clinical applications taking advantage of its ability to provide anatomical and functional information of live bodies noninvasively. Recently, microelectromechanical systems (MEMS) technologies, particularly actuators and sensors, have contributed to improving the PAI system performance, further expanding the research fields. This review introduces cutting-edge MEMS technologies for PAI and summarizes the recent advances of scanning mirrors and detectors in MEMS.
关键词： acoustic delay line,MEMS scanning mirror,photoacoustic imaging,microring resonator,micromachined US transducer,microelectromechanical systems (MEMS)
更新于2025-09-10 09:29:36